JPS62136566U - - Google Patents

Info

Publication number
JPS62136566U
JPS62136566U JP2369886U JP2369886U JPS62136566U JP S62136566 U JPS62136566 U JP S62136566U JP 2369886 U JP2369886 U JP 2369886U JP 2369886 U JP2369886 U JP 2369886U JP S62136566 U JPS62136566 U JP S62136566U
Authority
JP
Japan
Prior art keywords
ring
metal member
gas supply
cooling
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2369886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2369886U priority Critical patent/JPS62136566U/ja
Publication of JPS62136566U publication Critical patent/JPS62136566U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP2369886U 1986-02-20 1986-02-20 Pending JPS62136566U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2369886U JPS62136566U (enrdf_load_stackoverflow) 1986-02-20 1986-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2369886U JPS62136566U (enrdf_load_stackoverflow) 1986-02-20 1986-02-20

Publications (1)

Publication Number Publication Date
JPS62136566U true JPS62136566U (enrdf_load_stackoverflow) 1987-08-28

Family

ID=30822240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2369886U Pending JPS62136566U (enrdf_load_stackoverflow) 1986-02-20 1986-02-20

Country Status (1)

Country Link
JP (1) JPS62136566U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011035231A (ja) * 2009-08-04 2011-02-17 Koyo Thermo System Kk 熱処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011035231A (ja) * 2009-08-04 2011-02-17 Koyo Thermo System Kk 熱処理装置

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