JPH0482839U - - Google Patents

Info

Publication number
JPH0482839U
JPH0482839U JP12793390U JP12793390U JPH0482839U JP H0482839 U JPH0482839 U JP H0482839U JP 12793390 U JP12793390 U JP 12793390U JP 12793390 U JP12793390 U JP 12793390U JP H0482839 U JPH0482839 U JP H0482839U
Authority
JP
Japan
Prior art keywords
reaction tube
semiconductor laser
manufacturing apparatus
heating
laser manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12793390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12793390U priority Critical patent/JPH0482839U/ja
Publication of JPH0482839U publication Critical patent/JPH0482839U/ja
Pending legal-status Critical Current

Links

JP12793390U 1990-11-28 1990-11-28 Pending JPH0482839U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12793390U JPH0482839U (enrdf_load_stackoverflow) 1990-11-28 1990-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12793390U JPH0482839U (enrdf_load_stackoverflow) 1990-11-28 1990-11-28

Publications (1)

Publication Number Publication Date
JPH0482839U true JPH0482839U (enrdf_load_stackoverflow) 1992-07-20

Family

ID=31875415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12793390U Pending JPH0482839U (enrdf_load_stackoverflow) 1990-11-28 1990-11-28

Country Status (1)

Country Link
JP (1) JPH0482839U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013089682A (ja) * 2011-10-14 2013-05-13 Shin Etsu Handotai Co Ltd エピタキシャルウエーハの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013089682A (ja) * 2011-10-14 2013-05-13 Shin Etsu Handotai Co Ltd エピタキシャルウエーハの製造方法

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