JPS6319745U - - Google Patents
Info
- Publication number
- JPS6319745U JPS6319745U JP10926486U JP10926486U JPS6319745U JP S6319745 U JPS6319745 U JP S6319745U JP 10926486 U JP10926486 U JP 10926486U JP 10926486 U JP10926486 U JP 10926486U JP S6319745 U JPS6319745 U JP S6319745U
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- coil
- power
- ion source
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001629 suppression Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10926486U JPS6319745U (de) | 1986-07-18 | 1986-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10926486U JPS6319745U (de) | 1986-07-18 | 1986-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6319745U true JPS6319745U (de) | 1988-02-09 |
Family
ID=30987200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10926486U Pending JPS6319745U (de) | 1986-07-18 | 1986-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6319745U (de) |
-
1986
- 1986-07-18 JP JP10926486U patent/JPS6319745U/ja active Pending
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