JPH0163062U - - Google Patents

Info

Publication number
JPH0163062U
JPH0163062U JP1987157779U JP15777987U JPH0163062U JP H0163062 U JPH0163062 U JP H0163062U JP 1987157779 U JP1987157779 U JP 1987157779U JP 15777987 U JP15777987 U JP 15777987U JP H0163062 U JPH0163062 U JP H0163062U
Authority
JP
Japan
Prior art keywords
shield
cathode
voltage
acceleration
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987157779U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987157779U priority Critical patent/JPH0163062U/ja
Publication of JPH0163062U publication Critical patent/JPH0163062U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1987157779U 1987-10-15 1987-10-15 Pending JPH0163062U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987157779U JPH0163062U (de) 1987-10-15 1987-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987157779U JPH0163062U (de) 1987-10-15 1987-10-15

Publications (1)

Publication Number Publication Date
JPH0163062U true JPH0163062U (de) 1989-04-24

Family

ID=31437518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987157779U Pending JPH0163062U (de) 1987-10-15 1987-10-15

Country Status (1)

Country Link
JP (1) JPH0163062U (de)

Similar Documents

Publication Publication Date Title
JPH0163062U (de)
JPS6354241U (de)
JPS5974659U (ja) イオン注入装置のイオン発生装置
JPH0224290U (de)
JPS6292550U (de)
JPS6175052U (de)
JPS61100872U (de)
JPS6160568U (de)
JPH0282871U (de)
JPH0276462U (de)
JPS61166465U (de)
JPH0181849U (de)
JPS63179644U (de)
JPS62157137U (de)
JPS62161476U (de)
JPS6393100U (de)
JPH01132045U (de)
JPS63137450U (de)
JPH02146798U (de)
JPS61139562U (de)
JPS61174162U (de)
JPS6297168U (de)
JPH0244247U (de)
JPS6148645U (de)
JPH03103550U (de)