JPH0282871U - - Google Patents
Info
- Publication number
- JPH0282871U JPH0282871U JP16278288U JP16278288U JPH0282871U JP H0282871 U JPH0282871 U JP H0282871U JP 16278288 U JP16278288 U JP 16278288U JP 16278288 U JP16278288 U JP 16278288U JP H0282871 U JPH0282871 U JP H0282871U
- Authority
- JP
- Japan
- Prior art keywords
- voltage part
- part box
- ion source
- ion
- box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 7
- 238000005468 ion implantation Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16278288U JPH0282871U (de) | 1988-12-15 | 1988-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16278288U JPH0282871U (de) | 1988-12-15 | 1988-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282871U true JPH0282871U (de) | 1990-06-27 |
Family
ID=31446923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16278288U Pending JPH0282871U (de) | 1988-12-15 | 1988-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282871U (de) |
-
1988
- 1988-12-15 JP JP16278288U patent/JPH0282871U/ja active Pending
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