JPS63195734U - - Google Patents
Info
- Publication number
- JPS63195734U JPS63195734U JP8737187U JP8737187U JPS63195734U JP S63195734 U JPS63195734 U JP S63195734U JP 8737187 U JP8737187 U JP 8737187U JP 8737187 U JP8737187 U JP 8737187U JP S63195734 U JPS63195734 U JP S63195734U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer jig
- wafer transfer
- cassette
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 11
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8737187U JPS63195734U (me) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8737187U JPS63195734U (me) | 1987-06-05 | 1987-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195734U true JPS63195734U (me) | 1988-12-16 |
Family
ID=30944517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8737187U Pending JPS63195734U (me) | 1987-06-05 | 1987-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195734U (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014222700A (ja) * | 2013-05-13 | 2014-11-27 | 三菱電機株式会社 | ウエハの移し換え治具及びウエハの移し換え方法 |
-
1987
- 1987-06-05 JP JP8737187U patent/JPS63195734U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014222700A (ja) * | 2013-05-13 | 2014-11-27 | 三菱電機株式会社 | ウエハの移し換え治具及びウエハの移し換え方法 |
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