JPS62114444U - - Google Patents
Info
- Publication number
- JPS62114444U JPS62114444U JP203986U JP203986U JPS62114444U JP S62114444 U JPS62114444 U JP S62114444U JP 203986 U JP203986 U JP 203986U JP 203986 U JP203986 U JP 203986U JP S62114444 U JPS62114444 U JP S62114444U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- grooves
- hold
- workbench
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP203986U JPS62114444U (me) | 1986-01-13 | 1986-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP203986U JPS62114444U (me) | 1986-01-13 | 1986-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62114444U true JPS62114444U (me) | 1987-07-21 |
Family
ID=30780505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP203986U Pending JPS62114444U (me) | 1986-01-13 | 1986-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62114444U (me) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0650344U (ja) * | 1991-02-07 | 1994-07-08 | コマツ電子金属株式会社 | ウェーハ容器傾け台 |
| JP2013008920A (ja) * | 2011-06-27 | 2013-01-10 | Mitsubishi Electric Corp | ウェハカセット |
-
1986
- 1986-01-13 JP JP203986U patent/JPS62114444U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0650344U (ja) * | 1991-02-07 | 1994-07-08 | コマツ電子金属株式会社 | ウェーハ容器傾け台 |
| JP2013008920A (ja) * | 2011-06-27 | 2013-01-10 | Mitsubishi Electric Corp | ウェハカセット |