JPS63195554A - 静電容量型湿度センサ - Google Patents

静電容量型湿度センサ

Info

Publication number
JPS63195554A
JPS63195554A JP2684387A JP2684387A JPS63195554A JP S63195554 A JPS63195554 A JP S63195554A JP 2684387 A JP2684387 A JP 2684387A JP 2684387 A JP2684387 A JP 2684387A JP S63195554 A JPS63195554 A JP S63195554A
Authority
JP
Japan
Prior art keywords
electrode
lower electrode
upper electrode
voltage
impressed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2684387A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441944B2 (enrdf_load_stackoverflow
Inventor
Toyoaki Ueki
植木　豊昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marcon Electronics Co Ltd
Original Assignee
Marcon Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marcon Electronics Co Ltd filed Critical Marcon Electronics Co Ltd
Priority to JP2684387A priority Critical patent/JPS63195554A/ja
Publication of JPS63195554A publication Critical patent/JPS63195554A/ja
Publication of JPH0441944B2 publication Critical patent/JPH0441944B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2684387A 1987-02-07 1987-02-07 静電容量型湿度センサ Granted JPS63195554A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2684387A JPS63195554A (ja) 1987-02-07 1987-02-07 静電容量型湿度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2684387A JPS63195554A (ja) 1987-02-07 1987-02-07 静電容量型湿度センサ

Publications (2)

Publication Number Publication Date
JPS63195554A true JPS63195554A (ja) 1988-08-12
JPH0441944B2 JPH0441944B2 (enrdf_load_stackoverflow) 1992-07-09

Family

ID=12204552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2684387A Granted JPS63195554A (ja) 1987-02-07 1987-02-07 静電容量型湿度センサ

Country Status (1)

Country Link
JP (1) JPS63195554A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0441944B2 (enrdf_load_stackoverflow) 1992-07-09

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