JPS63195537A - 絶対圧形半導体圧力センサ - Google Patents

絶対圧形半導体圧力センサ

Info

Publication number
JPS63195537A
JPS63195537A JP2790387A JP2790387A JPS63195537A JP S63195537 A JPS63195537 A JP S63195537A JP 2790387 A JP2790387 A JP 2790387A JP 2790387 A JP2790387 A JP 2790387A JP S63195537 A JPS63195537 A JP S63195537A
Authority
JP
Japan
Prior art keywords
pressure
substrate
sensing chip
pressure sensing
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2790387A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0567168B2 (OSRAM
Inventor
Fukashi Kibune
木船　深志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP2790387A priority Critical patent/JPS63195537A/ja
Publication of JPS63195537A publication Critical patent/JPS63195537A/ja
Publication of JPH0567168B2 publication Critical patent/JPH0567168B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP2790387A 1987-02-09 1987-02-09 絶対圧形半導体圧力センサ Granted JPS63195537A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2790387A JPS63195537A (ja) 1987-02-09 1987-02-09 絶対圧形半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2790387A JPS63195537A (ja) 1987-02-09 1987-02-09 絶対圧形半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS63195537A true JPS63195537A (ja) 1988-08-12
JPH0567168B2 JPH0567168B2 (OSRAM) 1993-09-24

Family

ID=12233845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2790387A Granted JPS63195537A (ja) 1987-02-09 1987-02-09 絶対圧形半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPS63195537A (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02167441A (ja) * 1988-09-22 1990-06-27 Terumo Corp 使い捨て圧力変換器及び使い捨て圧力変換装置
JPH02131639U (OSRAM) * 1989-04-06 1990-11-01
JPH0465643A (ja) * 1990-07-05 1992-03-02 Mitsubishi Electric Corp 半導体圧力センサ及びその製造方法
CN111003683A (zh) * 2019-10-29 2020-04-14 武汉大学 一种SiC高温压力传感器及其封装方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02167441A (ja) * 1988-09-22 1990-06-27 Terumo Corp 使い捨て圧力変換器及び使い捨て圧力変換装置
JPH02131639U (OSRAM) * 1989-04-06 1990-11-01
JPH0465643A (ja) * 1990-07-05 1992-03-02 Mitsubishi Electric Corp 半導体圧力センサ及びその製造方法
CN111003683A (zh) * 2019-10-29 2020-04-14 武汉大学 一种SiC高温压力传感器及其封装方法

Also Published As

Publication number Publication date
JPH0567168B2 (OSRAM) 1993-09-24

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