JPS63190162A - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPS63190162A
JPS63190162A JP62292004A JP29200487A JPS63190162A JP S63190162 A JPS63190162 A JP S63190162A JP 62292004 A JP62292004 A JP 62292004A JP 29200487 A JP29200487 A JP 29200487A JP S63190162 A JPS63190162 A JP S63190162A
Authority
JP
Japan
Prior art keywords
plasma
substrate
electrode
energy
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62292004A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0355549B2 (enrdf_load_stackoverflow
Inventor
Takashi Tsuchimoto
槌本　尚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62292004A priority Critical patent/JPS63190162A/ja
Publication of JPS63190162A publication Critical patent/JPS63190162A/ja
Publication of JPH0355549B2 publication Critical patent/JPH0355549B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
JP62292004A 1987-11-20 1987-11-20 プラズマ処理装置 Granted JPS63190162A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62292004A JPS63190162A (ja) 1987-11-20 1987-11-20 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62292004A JPS63190162A (ja) 1987-11-20 1987-11-20 プラズマ処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP14375276A Division JPS5368171A (en) 1976-11-30 1976-11-30 Method and apparatus for plasma treatment

Publications (2)

Publication Number Publication Date
JPS63190162A true JPS63190162A (ja) 1988-08-05
JPH0355549B2 JPH0355549B2 (enrdf_load_stackoverflow) 1991-08-23

Family

ID=17776282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62292004A Granted JPS63190162A (ja) 1987-11-20 1987-11-20 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS63190162A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03274270A (ja) * 1990-03-22 1991-12-05 Matsushita Electric Ind Co Ltd 硬質炭素膜の合成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03274270A (ja) * 1990-03-22 1991-12-05 Matsushita Electric Ind Co Ltd 硬質炭素膜の合成方法

Also Published As

Publication number Publication date
JPH0355549B2 (enrdf_load_stackoverflow) 1991-08-23

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