JPS63189006A - System for adjusting frequency of piezoelectric vibrator - Google Patents

Abstract

PURPOSE:To improve productivity by automatizing the adjustment of the frequency of a vibrator, by selecting an object frequency approaching extremely to the oscillation frequency of a quartz oscillator to be adjusted from the basic data accumulation part of a computer, and inputting it a controller. CONSTITUTION:A frequency adjusting system consists of a vapor depositing device 7 in which a metallic particle is attached on the electrode of an adjusting vibrator 1, the controller 30 which controls the output of the vapor depositing device 7, and the computer 40 which operates and drives the controller 30. A reading part 41 reads the oscillation frequency of the vibrator 1, and connects it to a data retrieval part 43. The retrieval part 43 selects the basic data approaching extremely to the vibrator 1 out of a large number of oscillation frequencies stored in the basic data accumulation part 42. An arithmetic part 44 calculates a frequency difference between the vibrator 1 and the basic data, and controls a power control circuit 33 and a shutter driving circuit 32.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a piezoelectric resonator frequency adjustment system, and particularly to a crystal resonator frequency adjustment system that utilizes a computer and is highly productive.

(Background of the Invention) Piezoelectric resonators, such as crystal resonators, are frequently used as reference signal sources in various communication devices and digital control devices. Usually, an electrode for exciting the vibration frequency is formed on the crystal piece, and a mass is added to the electrode to adjust the vibration frequency. For example, the mass can be adjusted by metal vapor deposition. In recent years, due to increasing demand, a highly productive frequency adjustment system for piezoelectric vibrators has been desired.

(Prior Art) FIG. 4 is a schematic diagram illustrating a conventionally used frequency adjustment system for a crystal resonator. Note that FIG. 4(a) is a diagram of a crystal resonator to be adjusted (hereinafter referred to as an adjustment resonator);
b) is a simplified diagram of the vapor deposition apparatus, and (C) of the same figure is a block diagram of the control apparatus.

The adjustment vibrator 1 has a crystal piece 3 with electrodes #ii2 formed on its amphiboid surfaces held on a base 4, and a mask 6 having a hole 5 is placed on the crystal piece 3. The vibration frequency is adjusted in advance to be higher than the target frequency in a previous process.

The vapor deposition device 7 includes an annular transport table 9 which is disposed on the outer periphery of a Pelger (chamber 8) (not shown) and has a rotation mechanism, and a vapor deposition source 10 which attaches metal particles to the electrode 2 of the crystal piece 3. A plurality of adjustment vibrators 1 are mounted on the conveyor table 9.
are connected to the terminal hole 11 and arranged. The vapor deposition source 10 stores, for example, silver as a vapor deposition material (7) in a heater 12, and releases the discharge port 1 by opening and closing a shutter 14 connected to a plunger 13.
5. Scatter or block the vapor deposited (metal) particles from step 5.

The control device 16 includes a frequency setter 17 as a reference signal source that sets a target frequency, a frequency detector 18 that detects the vibration frequency of the adjustment vibrator 1, and a frequency detector 18 that detects the vibration frequency of the adjustment vibrator 1 and the target frequency. A comparator 19 that compares the frequencies and outputs a frequency match or mismatch signal, and a shutter drive circuit 2 that outputs an opening/closing signal based on the frequency match (mismatch) signal.
0, and a power control device 21 that manually selects a power source whose supply power is gradually reduced by a predetermined program and supplies it to the vapor deposition source 10 (heater 12).

For example, if the target frequency is 4 MHz, the adjustment vibrator 1
When adjusting the 0 frequency, the procedure is as follows.

First, the power source of the power control device 21 is selected based on the target frequency of the adjustment vibrator 1 and the frequency difference from the target frequency. For example, when the frequency difference is small, a power source with a program that supplies less power is selected in advance, and the deposition rate is reduced to increase the accuracy of vibration frequency adjustment. Then, the frequency setter 17 is set to 4MH2 and the control device is operated.

The vibration frequency of the adjustment vibrator 1, which is set in advance to 4 MHz or higher, is detected by the frequency detector 18. In the judgment circuit 19, the adjustment vibrator 1 is a frequency setter (reference signal source)
After confirming that the frequency is higher than the target frequency from 18, an open signal is sent to the shutter drive circuit @20. Shutter drive circuit 2
0, the shutter 14 is opened and metal particles from the evaporation source 10 are deposited on the electrode (2) of the adjustment vibrator 1.

(7) The adjusting vibrator 1 is deposited until it matches the target frequency of the frequency setter 10. When the adjusting vibrator 1 matches the target frequency, a close signal is sent to the shutter drive circuit 20 from the judgment step #T19. It is sent out and the shack 14 is closed.Then, by the 1lfi movement mechanism (not shown), the conveyance table 9 is rotated to position the next adjusting vibrator on the evaporation source 10.Subsequent crystal vibrators are placed in the same manner as described above. Adjust the frequency.

Therefore, in the case of frequency adjustment in which the target frequencies of a plurality of adjustment vibrators 1 are the same, it is only necessary to set the frequency setter 10 once, so it can be said that the frequency adjustment system is suitable for mass production.

(Problems with the Prior Art) However, in the frequency adjustment system with the above configuration, when adjusting the frequency of adjustment vibrators 1 having different target frequencies, the frequency setter 17 is adjusted for each adjustment vibrator (1). However, if there is a large variation in the frequency difference, the evaporation power source of the power control device 21 must also be selected. For example, if there are 50 adjustment vibrators 1 and the target frequency and difference frequency are different, the operator must set the frequency setter 10 and the power control device 21 each time, which requires 100 operations, making the work complicated. west,
There was a problem that reduced productivity.

(Objective of the Invention) An object of the present invention is to provide a frequency adjustment system for piezoelectric vibrators that facilitates work and improves productivity.

(Means for Solving the Invention) The present invention uses a computer as an operation signal source of a control device that detects the vibration frequency of an adjustment vibrator and controls an additional mass device, and uses the computer to a reading unit that stores the detected vibration frequency of the vibrator;
a plurality of basic data storage sections in which predetermined vibration frequencies are set and stored in advance; a search section that selects basic data closest to the vibration frequency of the piezoelectric vibrator to be adjusted; and basic data selected by the search section. The solving means includes a comparison circuit that compares the vibration frequency of the piezoelectric vibrator to be adjusted and sends an operation signal to the control device.

(Operation of the Invention) In the present invention, the data retrieval unit selects the target frequency that is closest to the vibration frequency of the crystal resonator to be adjusted from the basic data storage unit of the computer and inputs it to the control device.
It has the effect of automatically setting the target frequency of the piezoelectric vibrator for adjustment without having to set it at the time of adjustment. The present invention will be explained in detail below.

(Embodiments of the Invention) FIG. 1 is a diagram illustrating a frequency adjustment system for a piezoelectric vibrator according to the present invention. The same parts as those in the previous conventional example are given the same numbers, and the vapor deposition apparatus is shown in Figure 74 (Im).
will be cited and its detailed explanation will be omitted.

The frequency adjustment system shown in the embodiment of the present invention includes a vapor deposition device 7 that attaches metal particles to the electrode 2 of the adjustment vibrator 1, a control device 30 that controls the output of the vapor deposition device 7, and a control device 3 that controls the output of the vapor deposition device 7.
0 and a computer 40 that operates the 0.

The vapor deposition apparatus 7 is the same as that shown in the previous embodiment, and includes a rotating mechanism transport table 9 arranged on the outer periphery of the chamber 8 and arranging the adjustment vibrators 1, and a vapor deposition material such as silver, which is placed in the heater 12. It consists of an evaporation source 10 that accommodates and scatters metal particles, and a shutter 14 connected to a plunger 13 that allows the metal particles from the evaporation source 10 to pass or be blocked.

The control device 30 includes a frequency detector 31, a shutter drive circuit 32, a power control device 33, and is connected to a computer 40, which will be described later.

The frequency detector 31 measures the vibration frequency of the 1ii4 adjustment vibrator 1 and inputs it to the computer 4o. The shutter drive circuit 32 opens and closes the shutter 14 by sending an opening/closing signal based on an operation signal (frequency matching signal) from the computer 40 . The power control device 33 selects a power source whose supply power is programmed in advance based on an operation signal (power source selection signal) from the computer 40 and supplies the selected power source to the vapor deposition source IO.

The computer 40 includes a reading unit 41 for reading vibration frequencies from the frequency detector 31, a basic data storage unit 42, a data search unit 43, and a calculation unit 44.

The reading section 41 reads and stores the vibration frequency of the adjustment vibrator 1 measured by the frequency detector 31, and connects to the data search section 43. For example, the basic data storage section 42 is inputted in advance with the specification frequency (target frequency) of the adjustment vibrator 1 defined in a large number of specifications, stored therein, and is connected to the data search section 43 . The data search unit 43 selects basic data of a vibration frequency that is lower and closest to that of the adjustment vibrator 1 from among the large number of vibration frequencies stored in the basic data storage unit 42, and sends a frequency selection signal to the calculation unit 44. Output.

The calculation unit 44 calculates the frequency difference between the adjustment vibrator 1 and the basic data, generates a power supply selection signal and a frequency match (mismatch) signal, and sends them to the power control circuit 33 and the shack drive circuit 32, respectively.

Below is operation 4 using this adjustment system! '! Explain the main points. In addition, the conveyor table 9 is shown in a simplified layout diagram in FIG. 2 (7).
As shown above, the target frequency is random, for example, 1 to n.
The evaporation source 10 (shutter 14
) is the adjustment vibrator 1 located at
Vibrator 2, vibrator 3 according to the rotation direction shown by arrow (e)
, . . . Let the oscillator be n.

First, in response to an initial operation signal from the computer 40, the transport table 9 is intermittently rotated once by a drive mechanism (not shown), and the evaporation source 10 detects the vibration frequencies f1 to f0 of the III oral position vibrators 1 to n. Measurement is performed using a device 31. The vibration frequencies f to f are read into the reading section 41 of the computer 40, stored sequentially, and outputted to the data search section 43. For each of the vibration frequencies f8 to fn, the data search unit 43 sequentially selects vibration frequencies f, to f, and basic data D1 to D, 1 of the lower and closest frequency from the basic data search unit 43, and sequentially Hold. Vibration frequency 1
Frequency difference Δf□~ between □~f1 and basic data D1~D1
Δf,l is calculated by the calculator 44. Then, power supply selection signals pl to pn based on the frequency differences Δ1□ to Δf0 are generated and stored in order, and first a power supply selection signal p1 based on the frequency difference Δf1 of the wave j['lJ element 1 is sent to the power control circuit 33. Send. For example, when the frequency difference Δf is large, the power source selection signal is used to select and control the power source of the program that supplies a large amount of power. When the frequency difference △f□ is greater than a predetermined value compared to the target frequency, a frequency mismatch open signal is sent to the shutter drive circuit 32 j7 and the shack 14.
Open. The vibration frequency 1□ of the vibrator 1 increases as metal particles are deposited from the deposition source 10. The frequency of the vibrator 1 during vapor deposition is continuously measured by the frequency detector 31 and read into the reading unit 41 of the computer 40 . The calculator 44 continuously calculates the vibration frequency difference Δf' between the vibration frequency f11 and the basic data D1 of the data search section 43. When the vibration frequency difference Δf' becomes less than or equal to a predetermined value, the calculator 44
sends a frequency match signal to the shutter drive circuit 32, closes the shutter 14 in response to a close signal, and completes the frequency adjustment of the vibrator 1. Then, the transport table 9 is rotated one step to position the vibrator 2 at the vapor deposition source 10, and the vibration frequency is adjusted in the same manner as described above, and thereafter the frequencies of the vibrators 3 to n are adjusted.

In the frequency adjustment system with the above configuration, the computer 4
Since the target vibration frequency difference temperature is stored in the basic data storage unit 42 of 0, and the basic data of the vibration frequency closest to the adjustment vibrator 1 is selected by the data search unit 43,
Target frequencies of a plurality of adjustment vibrators 1 can be automatically set. Furthermore, the computing unit 44 calculates the frequency difference between the vibration frequency of the adjustment vibrator and the target frequency and sends a power supply selection signal based on the frequency difference to the power control circuit, so that the supplied power is automatically adjusted according to the frequency difference. You can choose.

Therefore, even if a large number of adjustment vibrators 1 with different target frequencies are arranged in a vapor deposition apparatus, the vibration frequency can be adjusted without the operator having to individually select the power supply and set the target frequency. can be simplified and productivity can be improved.

(Other matters) In the above embodiment, first, the vibration frequency of the adjustment vibrator was measured in advance by one revolution of the conveyance table 9, and was input and stored in the reading section 41 of the computer. Each frequency may be adjusted when reading the vibration frequency of the vibrator 1.

Further, the power control circuit 33 controls the power supplied to the vapor deposition source by selecting a preprogrammed power supply using a selection signal. For example, the frequency difference Δf of the adjustment vibrator 1 during vapor deposition is
The supplied power may be controlled to be reduced in proportion to .

In addition, if the vibration frequency and the target frequency are within a predetermined range and a constant power or programmed power is sufficient, the power control device 70 can be operated manually, for example, as shown in FIG.
may be set to a constant power or programmed power, the calculation unit 44 in the previous embodiment diagram may be simply used as a comparator 71 to compare the vibration frequency and the target frequency, and the shutter drive circuit 32 may be controlled by the opening/closing signal. .

In addition, in this embodiment, the mass adding device was explained as a vapor deposition device, but for example, an ion sputtering device or the like substantially adds or removes mass to the crystal piece and increases the frequency by 3J! due to the mass loading effect. It may also be a device for arranging. Although the present invention is named a piezoelectric vibrator frequency adjustment system, it can be applied to devices that are substantially equipped with piezoelectric pieces and require frequency adjustment, even if it is a small oscillator, in particular a small oscillator. When applied to the piezoelectric vibrator, it is optimal because there is no frequency change due to load fluctuations.

In short, a lot of basic data (target frequency) is stored in the computer.
It is within the technical scope of the present invention to select the basic data closest to the vibration frequency of the adjustment vibrator in memory setting 1 and automatically adjust the frequency of the adjustment vibrator using this as the target frequency. .

(Effects of the Invention) The present invention uses a computer as an operation signal source of a control device that detects the vibration frequency of an adjustment vibrator and controls an additional mass device, a reading unit that stores detected vibration frequencies; a plurality of basic data storage units in which predetermined vibration frequencies are set and stored; and a search that selects basic data that is closest to the vibration frequency of the piezoelectric vibrator to be adjusted. and a comparison circuit that compares the basic data selected by the search section with the vibration frequency of the piezoelectric vibrator to be adjusted and sends an operation signal to the control device, so that the target frequency of the vibrator for adjustment can be determined. It is possible to provide a frequency adjustment system for piezoelectric vibrators that automatically sets the frequency, simplifies work, and improves productivity.

[Brief explanation of the drawing]

Fig. 1 is a block configuration diagram of a frequency soft adjustment and adjustment system to explain an embodiment of the present invention, Fig. 2 is a simplified diagram of a vapor deposition apparatus used to explain the operation of an embodiment of the present invention, and Fig. 3 FIG. 2 is a block configuration diagram of a frequency adjustment system showing another embodiment of the present invention. Figure 4 is a diagram of a frequency adjustment system explaining a conventional example.
7 (a) is a diagram of the adjustment vibrator, (b) is a simplified diagram of the vapor deposition apparatus, and (e) is the control bag. FIG. 1 ・Adjustment vibrator, 9...Transportation platform, 10 Vapor deposition source, 1
2. Heater, 14-Shutter. Figure 2

Claims (1)

[Scope of Claims] A mass adding device that accommodates a piezoelectric vibrator to be adjusted and adds mass to a piezoelectric piece, and a device that detects the vibration frequency of the piezoelectric vibrator to be adjusted and adds mass so that the frequency becomes a target frequency. The computer includes: a control device that controls the device; and a computer that serves as an operation signal source for the control device; a plurality of basic data storage sections in which vibration frequencies are set and stored; a search section that selects basic data closest to the vibration frequency of the piezoelectric vibrator to be adjusted; and a search section that selects basic data that is closest to the vibration frequency of the piezoelectric vibrator for adjustment; A frequency adjustment system for a piezoelectric vibrator, comprising: a comparison circuit that compares the vibration frequency with the vibration frequency of the piezoelectric vibrator and sends an operation signal to the control device.