JP2006030009A - Frequency measurement apparatus, frequency adjustment apparatus, and frequency measurement method for piezoelectric vibration device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform accurate frequency adjustment for a piezoelectric vibration device without limiting a target frequency. <P>SOLUTION: A control unit 8 of the frequency measurement apparatus 2 is provided with a variable control unit 81 for automatically changing resolution on the basis of a preset target frequency, and an arithmetic processing unit 82 for performing frequency operations of the target frequency and a measured frequency on the basis of settings by the variable control unit 81. The variable control unit 81 changes a gate time on the basis of the target frequency as follows. When the measured frequency is 30 MHz or more, the gate time is set to be 3 msec. When the frequency is less than 30 MHz, the gate time is set to be 1 msec. Through the variability of the gate time, the resolution is set to be 1 Hz no matter whether the measured frequency is 30 MHz or more or less than 30 MHz. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a frequency measuring device and a frequency adjusting device for a piezoelectric vibrating device, and a frequency measuring method for a piezoelectric vibrating device.

  The frequency adjusting step of the piezoelectric vibrating device includes a step of lowering the frequency by depositing metal or the like on the piezoelectric vibrating plate and a step of increasing the frequency by etching a metal material previously formed on the piezoelectric vibrating plate.

For the frequency adjustment of the piezoelectric vibrating device, a frequency measuring device that continuously measures and displays the frequency of the piezoelectric vibrating device is used, and the frequency of the piezoelectric vibrating device is adjusted based on the frequency measured by the measuring device. (For example, refer to Patent Document 1).
Japanese Patent Laid-Open No. 11-61387

  By the way, in recent years, the frequency of piezoelectric vibration devices has been increased. Therefore, when adjusting the frequency of the piezoelectric vibrating device to a high frequency, the frequency to be adjusted is set to a high frequency value using a conventional frequency measuring device such as a measuring instrument described in Patent Document 1 described above, and frequency measurement is performed.

  However, in the conventional frequency measurement apparatus, the measurement condition is set to a resolution of a constant frequency. For example, the measurement conditions are set to low frequency or high frequency resolution.

  When the target frequency (target frequency) is a low frequency and the measurement condition is set to the low frequency resolution, the lower digits of the frequency value are not determined as the frequency increases. For example, when the frequency is digitally displayed, the entire display tube is lit, and the last few digits different from the actual value remain in the state of 8, and the frequency cannot be measured accurately.

  In addition, when the target frequency is a high frequency and measurement conditions are set for the high frequency resolution, the resolution decreases. However, high resolution is required at low frequencies, and the accuracy of frequency adjustment at low frequencies deteriorates.

  Accordingly, in order to solve the above-described problem, the present invention provides a frequency measuring device and a frequency adjusting device for a piezoelectric vibrating device that accurately measure the frequency of the piezoelectric vibrating device without limiting a target frequency, and a piezoelectric vibrating device. An object of the present invention is to provide a frequency measurement method.

  In order to achieve the above object, a frequency measuring apparatus for a piezoelectric vibrating device according to the present invention is a frequency measuring apparatus that measures a frequency in order to adjust the frequency of the piezoelectric vibrating device, based on a preset target frequency. A variable controller that automatically varies the resolution is provided.

According to the present invention, since the variable control unit is provided, the resolution can be varied by varying the frequency measurement interval based on the target frequency. Therefore, it becomes possible to keep the last digit (minimum unit) of the frequency constant in the resolution (for example, 1 Hz). For example, even when the resolution is lowered, the frequency measuring device automatically keeps the resolution constant. It becomes possible to measure. As a result, it is possible to adjust the frequency of the piezoelectric vibration device without limiting the preset target frequency.
The said structure WHEREIN: The gate time may be varied based on the said target frequency by the said variable control part.

  In this case, since the gate time is varied based on the target frequency, the resolution can be easily kept constant.

  In the above configuration, when a specific boundary frequency is set, a specific gate time is set, and the target frequency is equal to or higher than the boundary frequency, the gate time is longer than the specific gate time by the variable control unit. When the target frequency is less than the boundary frequency, the variable control unit may set the gate time to the specific gate time. For example, when the specific boundary frequency is set to 30 MHz and the specific gate time is set to 1 msec, the gate time may be set to 3 msec when the target frequency is 30 MHz or more, and the target frequency is less than 30 MHz. In this case, the gate time may be set to 1 msec.

  Some general-purpose frequency measurement devices have a function of automatically changing a digit to be displayed according to the target frequency. In such a case, an output value may be mistaken by an external device or the like. However, according to the present invention, the frequency to be changed is set as the boundary frequency, the gate time is varied by comparing the boundary frequency with the target frequency, and the number of digits of output data is kept constant. Is possible.

  The said structure WHEREIN: The display part which displays the content relevant to the measured frequency of the piezoelectric vibrator may be provided.

  In this case, since the display unit is provided, it is easy for the user to measure the frequency. In addition, since the variable control unit can set the same minimum frequency unit, even a high frequency with a reduced resolution can be measured in the same manner as a low frequency measurement. . In the case of a frequency measuring device not provided with the variable control unit, since the resolution is fixed, even when the content related to the frequency is displayed on the display unit, the value of the last digit continues to fluctuate, The value is never fixed. On the other hand, in the present invention, since the variable control unit can set the same minimum frequency unit at both low and high frequencies, the minimum frequency unit value to be displayed on the display unit is determined. Is possible. The content related to the frequency displayed on the display unit here may be the value of the measured frequency or the value of the frequency difference ΔF between the target frequency and the measured frequency.

  In the above configuration, the frequency measurement may be performed at an interval of 200 times / sec. The minimum frequency unit at this time is 1 Hz.

  In this case, since the frequency is measured at an interval of 200 times / sec, the frequency of the piezoelectric vibrating device can be measured with high accuracy in a short time.

  In order to achieve the above object, a frequency adjusting device for a piezoelectric vibrating device according to the present invention is a frequency adjusting device for adjusting the frequency of a piezoelectric vibrating device, the frequency measuring device according to the present invention, and the frequency of the piezoelectric vibrating device. An adjustment unit that adjusts the frequency by varying the frequency, and a stop unit that stops frequency fluctuation of the piezoelectric vibrating device by the adjustment unit based on the frequency measured by the frequency measurement device, and the adjustment unit and the The restraining unit is controlled by the frequency measuring device.

  According to the present invention, the frequency measuring device, the adjusting unit, and the restraining unit are provided, and the adjusting unit and the restraining unit are controlled by the frequency measuring device, so that the preset frequency is limited. Therefore, it is possible to accurately measure the frequency and adjust the frequency of the piezoelectric vibrating device based on the measured frequency.

  In order to achieve the above object, a frequency measurement method for a piezoelectric vibration device according to the present invention is based on a preset target frequency in a frequency measurement method for measuring a frequency in order to adjust the frequency of the piezoelectric vibration device. It has the variable control process which changes a resolution automatically.

  According to the present invention, since the variable control step is included, the resolution can be varied based on the target frequency, and the frequency measurement interval can be varied with the target frequency as a boundary. Therefore, the frequency setting can be shifted by one digit. For example, even when the resolution is lowered, the measurement can be automatically performed by the method. As a result, it is possible to adjust the frequency of the piezoelectric vibrating device without limiting the preset frequency.

  According to the frequency measuring device and the frequency adjusting device of the piezoelectric vibrating device and the frequency measuring method of the piezoelectric vibrating device according to the present invention, the frequency of the piezoelectric vibrating device can be adjusted without limiting the target frequency.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the embodiment described below, a case where the present invention is applied to a crystal resonator as a piezoelectric vibration device is shown.

  The frequency adjustment device 1 according to the present embodiment is a device responsible for one manufacturing process of a crystal resonator, and is a device that adjusts the frequency of the crystal resonator to a target frequency.

  As shown in FIG. 1, the frequency adjusting device 1 includes a vacuum main chamber 11 for adjusting the frequency of the crystal resonator to a preset target frequency (see below), and a vacuum reserve for setting the atmospheric pressure to a vacuum state. A chamber 12, a carrier 13 on which 50 crystal resonators are mounted, and a transport rail 14 for transporting the carrier 13 to the vacuum main chamber 11 are provided. The vacuum main chamber 11 and the vacuum preparatory chamber 12 are continuously arranged, and the carrier 13 is transferred from the outside to the vacuum main chamber 11 through the vacuum preparatory chamber 12, and frequency adjustment is performed in the vacuum main chamber 11. The carrier 13 on which the performed crystal resonator is mounted is carried out to the outside through the vacuum preliminary chamber 12.

  The vacuum preparatory chamber 12 is provided with gates 15 (15a, 15b, 15c, 15d) at the loading / unloading port for loading / unloading the carrier 13 to / from the outside and the connection port for loading / unloading the carrier 13 to / from the vacuum main chamber 11 ing. The vacuum main chamber 11 is kept in a vacuum state by opening / closing the loading / unloading port and the communication port by the gate 15.

  An adjustment unit 16 that adjusts the frequency of the crystal resonator is provided inside the vacuum main chamber 11. The adjustment unit 16 includes a coarse adjustment unit 17 that performs coarse adjustment of the frequency of the crystal resonator and a fine adjustment unit 18 that performs fine adjustment. Each of the coarse adjustment unit 17 and the fine adjustment unit 18 is provided with a shutter (not shown, a stop unit in the present invention), and the frequency of the crystal resonator mounted on the carrier 13 is within a preset target frequency range. If it is adjusted inward, the frequency adjustment is stopped by closing the shutter.

  Next, the frequency adjustment of the crystal resonator in the frequency adjusting device 1 described above will be described below with reference to FIG. Note that all the gates 15 are closed, and the vacuum main chamber 11 is in a vacuum state.

  Fifty crystal units are mounted on the carrier 13 on the transport rail 14 (point A).

  When the carrier 13 is arranged on the transport rail 14, the gate 15a is opened, and the carrier 13 is transported into the vacuum preliminary chamber 12 (point B). When the carrier 13 is transported to the vacuum preliminary chamber 12, the gate 15a is closed, and then the vacuum preliminary chamber 12 is evacuated. When the vacuum preliminary chamber 12 is in a vacuum state, the gate 15b is opened and the carrier 13 is transferred into the vacuum main chamber 11 (point C). Then, the gate 15b is closed to adjust the frequency of the crystal resonator.

  At the point C, the frequency coarse adjustment of the crystal resonator is performed. In this rough frequency adjustment, the frequency adjustment is performed by weighting by partially performing vacuum deposition on the metal film formation region of the crystal resonator.

  When the coarse frequency adjustment of the crystal unit is completed, the carrier 13 is transported to the point D, and the fine frequency adjustment of the crystal unit is performed. Similarly, in this fine frequency adjustment, the frequency is adjusted by weighting, in which the vacuum deposition is partially performed on the metal film formation region of the crystal resonator. For the frequency adjustment, in addition to the method of weight addition using the vacuum deposition method, for example, a metal film is formed in advance in the adjustment region, and the metal film is removed by laser beam, electron beam, or ion milling. It is possible to adopt a method by weight removal or the like.

  When the frequency adjustment of the crystal unit is finished, the conveyance direction by the conveyance rail 14 is reversed by the reversing unit 19 (point E, the arrow direction shown in FIG. 1), and the carrier 13 is conveyed to the gate 15c (point F). Then, the gate 15c is opened, and the carrier 13 is transported into the vacuum preliminary chamber 12 (point G).

  When the carrier 13 is transferred to the vacuum preliminary chamber 12, the gate 15c is closed, and the vacuum state in the vacuum preliminary chamber 12 is set to atmospheric pressure. When the inside of the vacuum preliminary chamber 12 becomes atmospheric pressure, the gate 15d is opened, the carrier 13 is carried out to the outside (point H), and the gate 15d is closed. Then, the crystal resonator mounted on the carrier 13 is carried out to each case (not shown) depending on whether the frequency adjustment is good or bad.

  After unloading the crystal unit, the carrier 13 is transported to the crystal resonator mounting position (point A) by the reversing unit 19 where the transport direction by the transport rail 14 is reversed (point I, the arrow direction shown in FIG. 1). The

  By the way, in the frequency adjustment of the crystal resonator in the frequency adjusting device 1 described above, the frequency is measured, and the frequency measuring device 2 controls the adjusting unit 16 to stop the frequency adjustment after adjusting the frequency of the crystal resonator to the target frequency. Is used.

  The frequency measuring apparatus 2 continuously measures the frequency of the crystal resonator in the coarse adjustment and fine adjustment of the frequency by the adjustment unit 16, and controls the shutter so that the frequency adjustment is stopped when the frequency is adjusted to the target frequency. To do. Further, the frequency measuring device 2 is provided individually corresponding to each of the coarse adjustment unit 17 and the fine adjustment unit 18. The two frequency measuring devices 2 have the same configuration except that the frequency adjustment range is different. Therefore, the same reference numerals are given to the configurations of these two frequency measurement devices 2. In this embodiment, the frequency measurement device 2 corresponding to the fine adjustment unit 18 will be described, and the description of the frequency measurement device 2 corresponding to the coarse adjustment unit 17 will be omitted.

  As shown in FIGS. 2 and 3, the frequency measuring device 2 according to the present embodiment relates to the power source 3 of the measuring device 2, the setting unit 4 for setting the frequency, and the measured frequency of the crystal resonator. The display unit 5 that displays the content, the lamp unit 6 that is turned on based on the condition setting in the setting unit 4, the audio output unit 7 that outputs audio based on the condition setting in the setting unit 4, and the measurement device 2 are controlled. And a control unit 8.

  As shown in FIG. 3, the setting unit 4 includes a target frequency setting unit 41 that sets a target frequency and a frequency setting unit 42 that sets conditions for the frequency to be measured.

  The target frequency setting unit 41 sets a frequency (target frequency) to be adjusted by fine adjustment of the frequency. The target frequency according to the present embodiment is input in units of Hz.

  In the frequency setting unit 42, in order to grasp whether or not the crystal resonator is a good product based on the measured frequency, the frequency region is classified into five regions. In the frequency setting unit 42, four frequency boundaries are set. In the present embodiment, these four boundaries are defined as a first boundary 43, a second boundary 44, a third boundary 45, and a fourth boundary 46 in order from the high frequency side boundary (see FIG. 2). The frequency setting unit 42 determines that the crystal resonator is defective when the measured frequency of the crystal resonator exceeds the first boundary. If the measured frequency of the crystal resonator is equal to or less than the fourth boundary, the frequency resonator 42 determines the crystal resonator. Control is performed by the control unit 8 so as to determine that the vibrator is a non-defective product. In the present embodiment, the frequency value set by the frequency setting unit 42 is the absolute value of the frequency difference ΔF of the measured frequency with respect to the frequency set by the setting unit (see the control unit 8 described below). In addition, the frequency corresponding to the four boundaries 43, 44, 45, and 46 according to the present embodiment is input in units of Hz.

  As shown in FIG. 3, the control unit 8 has a variable control unit 81 that automatically varies the resolution based on a preset target frequency, and the target frequency is measured based on a setting condition by the variable control unit 81. An arithmetic control unit 82 that performs frequency calculation with the frequency is provided.

  In the variable controller 81, the gate time is varied based on the target frequency. That is, when the measured frequency is 30 MHz or higher, the gate time is set to 3 msec, and when the frequency is less than 30 MHz, the gate time is set to 1 msec. By changing the gate time, even if the measured frequency is 30 MHz or more, or the measured frequency is less than 30 MHz, the resolution is set to 1 Hz.

  The arithmetic control unit 82 calculates the value of the frequency difference ΔF between the measured frequency and the set target frequency based on the setting condition by the variable control unit 81 described above. The calculation in the calculation control unit 82 is performed by subtracting the measured frequency from the target frequency.

  The lamp unit 6 corresponds to the four boundaries 43, 44, 45, 46 of the frequency setting unit 42, and includes a U lamp 61, an H lamp 62, an M lamp 63, an L lamp 64, and an S lamp 65. Composed. The U lamp 61 is lit when the value of the frequency difference ΔF calculated by the calculation control unit 82 exceeds the first boundary 43. The H lamp 62 is turned on when the value of the frequency difference ΔF calculated by the arithmetic control unit 82 is equal to or less than the first boundary 43 and exceeds the second boundary 44. The M lamp 63 is lit when the value of the frequency difference ΔF calculated by the calculation control unit 82 is equal to or less than the second boundary 44 and exceeds the third boundary 45. The L lamp 64 is lit when the value of the frequency difference ΔF calculated by the calculation control unit 82 is equal to or less than the third boundary 45 and exceeds the fourth boundary 46. The S lamp 65 is lit when the value of the frequency difference ΔF calculated by the calculation control unit 82 is less than the fourth boundary 46 from the target frequency.

  The display unit 5 displays the value of the frequency difference ΔF calculated by the calculation control unit 82.

  The audio output unit 7 produces an audible sound in proportion to the frequency difference ΔF that is the difference between the measured frequency and the target frequency. The frequency of the audible sound is configured so that the frequency changes as the frequency difference ΔF changes. Therefore, it can be confirmed by sounding that the frequency difference ΔF approaches 0, that is, approaches the target frequency. The output level of the audible sound can be adjusted by the knob portion 71.

  Next, frequency measurement of the crystal resonator in the above-described frequency measuring device 2 will be described with reference to FIGS. In each adjustment step in the adjustment unit 16 of the frequency adjustment device 1 described above, the frequency measurement device 2 measures the frequency of the crystal resonator at an interval of 200 times / sec.

  First, a target frequency is set in the target frequency setting unit 41 (step S1). In addition, frequencies corresponding to the four boundaries 43, 44, 45, and 46 in the frequency setting unit 42 are set. In the present embodiment, the frequencies corresponding to the four boundaries 43, 44, 45, and 46 are set in order as 99999 Hz, 50000 Hz, 10000 Hz, and 200 Hz. After these frequency settings are completed, power is supplied from the power source 3. After the power is input, an input signal related to the frequency of the crystal resonator to be measured is input from the fine adjustment unit 18 at an interval of 200 times / sec.

  Next, when the target frequency is set to 30 MHz in Step S1 (Yes in Step S2), the gate time is set to 3 msec by the variable control unit 81, and the minimum unit of frequency is set to 1 Hz (Step S3, in the present invention). A variable control process).

  When the target frequency is set to 10 MHz in step S1 (No in step S2), the variable control unit 81 sets the gate time to 1 msec, and similarly sets the minimum unit of frequency to 1 Hz (step S4, the present invention). Variable control step).

  After the gate time is set in steps S3 and S4, the calculation control unit 82 calculates the value of the frequency difference ΔF between the measured frequency and the set target frequency based on the set gate time (step S5). Next processing step).

  Then, the value of the frequency difference ΔF between the measured frequency calculated by the arithmetic control unit 82 and the set target frequency is displayed on the display unit 5 shown in FIG. Then, the lamp of the lamp unit 6 corresponding to the frequency region distinguished by the frequency setting unit 42 having the absolute value of the frequency difference ΔF within the range is turned on.

  For example, when the absolute value of the frequency difference ΔF is 0 Hz and the frequency of the fourth boundary 46 is 200 Hz, the S lamp 65 is lit. At this time, an output signal for driving the shutter is output from the control unit 8 to the adjustment unit 16, and the above-described frequency adjustment device 1 determines that the measured crystal resonator is a non-defective product. Then, in the adjustment unit 16, the frequency adjustment is completed by etching or blocking vapor deposition on the crystal resonator by the shutter.

  Further, when the absolute value of the frequency difference ΔF is 100000 Hz and the frequency of the first boundary 43 is 99999 Hz, the U lamp 61 is turned on. At this time, an output signal for stopping the frequency adjustment is output from the control unit 8 to the adjustment unit 16, and the above-described frequency adjustment apparatus 1 determines that the measured crystal resonator is a defective product. Then, in the adjustment unit 16, the frequency adjustment is completed by etching or blocking vapor deposition on the crystal resonator by the shutter.

  When the H lamp 62, the M lamp 63, and the L lamp 64 are lit, it means that the frequency is still being adjusted. The frequency adjustment of the crystal resonator is performed by the frequency adjustment device 1, and the crystal by the frequency measurement device 2 is adjusted. The frequency of the vibrator is measured.

  As described above, according to the frequency adjustment device 1 according to the present embodiment, the adjustment unit 16, the frequency measurement device 2, and the shutter are provided, and the shutter is controlled by the frequency measurement device 2. Without being limited, it is possible to accurately measure the frequency and adjust the frequency of the crystal resonator based on the measured frequency.

  Further, as described above, according to the frequency measurement device 2 according to the present embodiment, since the variable control unit 81 is provided, the resolution is varied based on the target frequency, and the frequency is set with the target frequency as a boundary. The measurement interval can be varied. Therefore, the setting of the minimum unit of the frequency can be set to the same 1 Hz. For example, even when the resolution is lowered, the frequency adjustment device 1 can automatically measure. As a result, the frequency of the crystal resonator can be adjusted without limiting the preset frequency. In addition, since the frequency measurement method according to the present embodiment includes a variable control step, the same function and effect are obtained.

  In addition, since the display unit 5 is provided, it is easy for the user to measure the frequency. In addition, since the minimum unit of frequency can be set to 1 Hz by the variable control unit 81, even a high frequency whose resolution is lowered can be measured in the same manner as the measurement of a low frequency.

  That is, in the case of a frequency measuring device not provided with the variable control unit 81, since the resolution is fixed, even when the content related to the frequency is displayed on the display unit, the value of the minimum unit varies. Continuing, the value is never fixed. On the other hand, in the frequency measurement device 2 according to the present embodiment, the variable control unit 81 can shift the frequency setting by one digit, so that the minimum unit value of the frequency displayed on the display unit 5 can be determined. .

  Further, since the frequency measurement is performed at an interval of 200 times / sec, the frequency measurement of the crystal resonator can be accurately performed in a short time.

  Further, since the gate time is varied based on the target frequency by the variable controller 81, the resolution can be easily varied.

  By the way, some general-purpose frequency measurement devices have a function of automatically changing the digit to be displayed according to the target frequency. In such a case, the output value may be misidentified by an external device or the like. . However, according to the frequency measurement device 2 according to the present embodiment, when the specific boundary frequency is set and the specific gate time is set and the target frequency is equal to or higher than the boundary frequency, the variable control unit 81 performs the gate operation. The time is set to be longer than a specific gate time, and when the target frequency is less than the boundary frequency, the variable control unit 81 sets the gate time to a specific gate time. Therefore, by setting the frequency to be changed as the boundary frequency and comparing the boundary frequency with the target frequency, the gate time can be varied and the number of digits of the output data can be kept constant. Specifically, in the present embodiment, the specific boundary frequency is set to 30 MHz, the specific gate time is set to 1 msec, the gate time is set to 3 msec when the target frequency is 30 MHz or more, and the target frequency is less than 30 MHz. The gate time is set to 1 msec.

  In the present embodiment, the crystal resonator is used as the piezoelectric vibration device. However, the present invention is not limited to this, and a device using another piezoelectric element may be used.

  In the present embodiment, 50 crystal resonators can be mounted on the carrier 13, but the present invention is not limited to this.

  Further, in the present embodiment, the frequency measuring device 2 corresponding to each of the coarse adjustment unit 17 and the fine adjustment unit 18 is provided. However, the present invention is not limited to this, and the frequency adjustment corresponding to the adjustment unit 16 is provided. One apparatus 1 may be provided.

  In the present embodiment, the display unit 5 displays the value of the frequency difference ΔF between the target frequency and the measured frequency. However, the present invention is not limited to this. Good. In this case, the audio output unit 7 or the lamp unit 6 checks the frequency difference ΔF between the target frequency and the measured frequency.

  In this embodiment, the target frequency is set to 10 and 30 MHz. However, the present invention is not limited to this and may be set arbitrarily. For example, it may be 100 MHz. In this case, it is preferable that the variable control unit 81 is set so that the resolution is automatically varied with 30 MHz and 90 MHz as a boundary. In this case, the frequency is set to 30 MHz and 90 MHz, but this is a preferable example, and the present invention is not limited to this, and other frequencies may be set.

  In the present embodiment, the frequency measurement is performed at an interval of 200 times / sec. However, this is a preferred example and is not limited to this, and the frequency measurement is performed at an arbitrary interval. Good.

  In the present embodiment, the shutter is used as the restraining unit, but the present invention is not limited to this, and any shutter may be used as long as it stops the change in the frequency of the crystal resonator.

  Moreover, in this Embodiment, although the unit is set to Hz and the input of the setting part 4 is performed, it is not limited to this, You may set a unit arbitrarily.

  In the present embodiment, the crystal resonator is regarded as a defective product only when the measured frequency of the crystal resonator exceeds the first boundary 43, but the present invention is not limited to this. The range regarded as non-defective can be arbitrarily changed. For example, when the measured frequency of the crystal resonator exceeds the second boundary 44 or the third boundary 45, the crystal resonator may be regarded as a defective product.

  The present invention can be implemented in various other forms without departing from the spirit or main features thereof. Therefore, the above-described embodiment is merely an example in all respects and should not be interpreted in a limited manner. The scope of the present invention is indicated by the claims, and is not restricted by the text of the specification. Further, all modifications and changes belonging to the equivalent scope of the claims are within the scope of the present invention.

  The present invention can be applied to a piezoelectric vibration device manufacturing apparatus. This is particularly useful when quartz is used for the vibration substrate of the piezoelectric vibration device.

It is a schematic block diagram of the frequency adjustment apparatus of the crystal oscillator concerning this Embodiment. It is a schematic block diagram of the frequency measuring apparatus of the crystal oscillator concerning this Embodiment. 1 is a block diagram of a schematic configuration of a frequency measuring apparatus for a crystal resonator according to an embodiment. It is the flowchart figure which showed a part of frequency measurement process of the crystal oscillator concerning this Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Frequency adjustment apparatus 16 Adjustment part 2 Frequency measurement apparatus 5 Display part 81 Variable control part

Claims (7)

In a frequency measurement device that measures frequency to adjust the frequency of a piezoelectric vibration device,
A frequency measurement apparatus for a piezoelectric vibration device, comprising a variable control unit that automatically varies a resolution based on a preset target frequency.   The frequency measurement apparatus for a piezoelectric vibration device according to claim 1, wherein the gate time is varied based on the target frequency by the variable control unit. A specific boundary frequency is set, a specific gate time is set,
When the target frequency is equal to or higher than the boundary frequency, the variable control unit sets the gate time to be longer than the specific gate time,
3. The frequency measurement apparatus for a piezoelectric vibrating device according to claim 2, wherein when the target frequency is less than the boundary frequency, a gate time is set to the specific gate time by the variable control unit.   4. The frequency measuring apparatus for a piezoelectric vibrating device according to claim 1, further comprising a display unit that displays contents related to the measured frequency of the piezoelectric vibrator.   The frequency measurement apparatus for a piezoelectric vibrating device according to any one of claims 1 to 4, wherein the frequency is measured at an interval of 200 times / sec. In a frequency adjusting device for adjusting the frequency of a piezoelectric vibration device,
A frequency measuring device according to any one of claims 1 to 5;
An adjustment unit for adjusting the frequency by changing the frequency of the piezoelectric vibration device;
Based on the frequency measured by the frequency measuring device, a stop unit that stops the frequency fluctuation of the piezoelectric vibration device by the adjustment unit, and is provided,
The frequency adjusting device for a piezoelectric vibration device, wherein the adjusting unit and the restraining unit are controlled by the frequency measuring device. In the frequency measurement method for measuring the frequency in order to adjust the frequency of the piezoelectric vibration device,
A method for measuring a frequency of a piezoelectric vibration device, comprising a variable control step of automatically changing a resolution based on a preset target frequency.

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