JPH11195946A - Frequency adjustment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a frequency adjustment device that adjusts crystal vibrators at a high speed effectively even in the case that dispersion in a frequency adjustment amount of piezoelectric elements such as crystal vibrators is high. SOLUTION: The adjustment device consists of pluralities of adjustment sections having frequency measurement and frequency arithmetic functions, which are a 1st rough adjustment section 11, a 2nd rough adjustment section 12, a 3rd rough adjustment section 13 and a fine-adjustment section 14. Each of the rough adjustment sections measures the frequency of crystal vibrators 2 before adjustment and calculates the frequency to equalize the amount of adjustment. Thus, the frequency of the crystal vibrators is adjusted with high productivity and efficiency.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for quickly and efficiently adjusting the frequency of a quartz oscillator having electrodes formed on the surface of a piezoelectric element such as a quartz piece.

[0002]

2. Description of the Related Art A quartz oscillator will be described as an example. For example, the resonance frequency of an AT-cut quartz resonator is determined by the thickness of the quartz piece and the mass of the metal electrode film on the surface formed on the surface by vapor deposition or the like. In the crystal oscillator, a frequency variation is generated in which a variation in the thickness of the crystal blank and a variation in the thickness of the electrode film are combined. It is necessary to adjust this frequency variation to a predetermined frequency by increasing or decreasing the mass of the electrode film by vacuum deposition or etching.

[0003] However, this variation in frequency greatly differs depending on the shape or the manufacturing process. In the case of adjusting a crystal resonator having a large variation, it takes time to adjust the crystal resonator. Since the processing of the crystal blank and the formation of the electrode film process many pieces at the same time, the productivity is high. However, in the frequency adjustment, since the individual crystal units are adjusted to the target frequency, adjustment for each crystal unit is required, and the productivity is low. Therefore, in order to shorten the adjustment time and improve the productivity, it is conceivable to provide a plurality of adjustment portions in one frequency adjustment device to improve the productivity.

[0004] As a conventional frequency adjusting device for a quartz oscillator, for example, a device disclosed in Japanese Patent Application Laid-Open No. 8-181558 is known. In this frequency adjusting apparatus, as shown in FIG. 1, a quartz oscillator 2 is continuously supplied by a transport unit 6 in a vacuum adjusting chamber 1, and a coarse adjusting unit 3 for adjusting at high speed, and adjusting at a medium speed. The control unit includes a coarse / fine adjustment unit 4 and a fine adjustment unit 5 that adjusts at a low speed. Each adjustment unit performs adjustment up to a predetermined target frequency. For example, the high-speed adjusting unit 3 adjusts up to 200 ppm of the target frequency,
The medium-speed adjusting unit 4 adjusts up to the target frequency of 50 ppm, and the low-speed adjusting unit 5 adjusts up to the target frequency. Since very high precision is required for the adjustment of the crystal unit, as described above, at least a coarse adjustment unit that performs rough adjustment at a high speed,
It is composed of a fine adjustment unit that adjusts accurately at low speed.

[0005] As an adjustment amount, from 500 ppm to 2000
ppm, and the determined adjustment end frequencies are set in the adjustment units 3, 4, and 5, and the adjustment units of the respective adjustment units include:
The adjustment can be performed at an adjustment speed according to the adjustment amount.

However, when the frequency variation of the crystal unit before the adjustment is very large and the adjustment amount is large, the adjustment speed is limited, the adjustment time of the first adjustment unit 3 becomes very long, and the adjustment of the entire apparatus is performed. The time is determined by the adjustment time of the adjustment unit 3. On the other hand, in the case of a crystal unit having a small adjustment amount, the adjustment unit 3
Processing time is very short, but the adjustment time is
5, and the adjustment time of the entire apparatus cannot be reduced.

[0007]

In the conventional frequency adjuster, when the amount of adjustment is large, the first adjustment unit takes an adjustment time, and there is a problem that productivity is remarkably reduced. Even if the number of adjustment units for high-speed coarse adjustment is increased, it is easy for the adjustment unit to adjust to a predetermined frequency, but the adjustment unit is effective for a vibrator with a small adjustment amount. Will not be processed.

The present invention provides a frequency adjusting apparatus capable of adjusting the entire apparatus at high speed and effectively even when the frequency adjustment amount of a piezoelectric element such as a quartz oscillator has a large variation. is there.

[0009]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and measures a resonance frequency before frequency adjustment and measures variation in each crystal oscillator.
Means for uniformly adjusting the adjustment amount of each adjustment unit is provided.

[0010]

By making the adjustment amounts equal in the respective adjustment units, the adjustment time of each adjustment unit is equalized, and the adjustment time of the entire adjustment device is minimized. For a crystal unit with a large adjustment amount, the adjustment time of each adjustment unit increases evenly, and for a crystal unit with a small adjustment amount, the adjustment time of each adjustment unit is shortened evenly, and the adjustment unit for a long adjustment time ,
Adjustments can be made evenly so that there is no adjustment unit with a short adjustment time.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a frequency adjusting apparatus according to the present invention will be described below with reference to FIGS.

FIG. 2 is an explanatory diagram of the first embodiment of the present invention. The adjustment chamber 1 includes a first coarse adjustment unit 11, a second coarse adjustment unit 12, a third coarse adjustment unit 13, and a fine adjustment unit 14 at the beginning, and each adjustment unit is a network.・ Has a frequency measurement function like an analyzer and a frequency calculation function. For example, Japanese Patent Application No. Hei 8-1540
As shown at 28, the apparatus is configured so that the adjustment can be performed while measuring the frequency. The adjusting chamber 1 is evacuated by a vacuum pump, and there are a charging chamber and an unloading chamber before and after the adjusting chamber 1, but they are omitted in this embodiment.

The crystal unit 2 is continuously supplied by the transport unit 6, and when it reaches the first coarse adjustment unit 11 first, the first coarse adjustment unit 11 measures the frequency before adjustment. In the present embodiment, since there are three coarse adjustment adjusting sections, one third of the difference from the target frequency is adjusted. Next, when the crystal unit 2 arrives at the second coarse adjustment unit 12, the second coarse adjustment unit 12
Measures the frequency and adjusts the half of the difference from the target frequency. Next, the third coarse adjustment unit 13 adjusts the frequency slightly before the target frequency. The last fine adjustment unit 14 adjusts a very small frequency up to the remaining target frequency. The frequency measurement may be performed before the adjustment or at the start of the adjustment. Since each of the adjustment units has the frequency calculation, the adjustment can be performed independently without being related to other adjustment units. In addition, even if the adjustment amount is insufficient due to some trouble in the adjustment unit in the previous stage,
Subsequent adjustment can be made by the adjustment unit. For example, the first
If the coarse adjustment unit 11 does not perform the adjustment sufficiently, the second coarse adjustment unit 12 and the third coarse adjustment unit 13 perform the adjustment by sharing one half at a time. There is no time burden on the department. In this way, it is possible to provide redundancy even for some troubles such as poor electrical contact.

FIG. 3 shows a second embodiment. In this embodiment, the frequency is measured before all adjustments, the frequency to be adjusted is transmitted to each adjustment unit, and each adjustment unit adjusts according to the frequency. The first coarse adjustment unit 11, the second coarse adjustment unit 12, the third coarse adjustment unit 13, and the fine adjustment unit 14 have a function of measuring a frequency like a frequency counter, and are connected to each adjustment unit. It is composed of a control unit 15 having an arithmetic function and a communication function like a computer.

The crystal oscillator 2 first has a first coarse adjustment unit 1.
1, the first coarse adjustment unit 11 measures the frequency before adjustment, and this frequency is transmitted to the control unit 15, and the control unit 15 sends the first coarse adjustment unit 11 a difference of 3 from the target frequency. One-third frequency is set, two thirds of the difference from the target frequency is set in the second coarse adjustment unit 12, and a frequency slightly before the target frequency is set in the third coarse adjustment unit 13. I do.
A target frequency is set in the fine adjustment unit 14. The respective adjustment units start adjustment at the same time, and after all the adjustment units have been adjusted, the crystal unit 2 is moved to the next adjustment unit by the transport unit 6. The control unit 15 shown here is the first coarse adjustment unit 1
The second coarse adjustment unit 1 calculates the frequency measured in
2. Instead of transmitting to the third coarse adjustment unit 13, the control unit 1
5 and transmitted from the control unit 15 to the second coarse adjustment unit 12 when the crystal unit 2 that has passed through the first coarse adjustment unit 11 reaches the second coarse adjustment unit 12. Is done.
The same is transmitted to the third coarse adjustment unit 13.

In the description of the second embodiment, the adjustment section does not have the function of calculating the measured frequency, and the control section 15 controls the entire apparatus. The control unit 15 can be included in each of the adjustment units 11 to 14.

Further, by measuring the frequency before adjustment, unnecessary adjustment for defective products can be prevented, and productivity can be improved.

[0018]

In the frequency adjusting apparatus according to the present invention, since the respective adjusting units adjust equally as described above, the adjusting time of each adjusting unit can be equalized, and the productivity is high.
A frequency adjustment device with good equipment efficiency can be provided. In addition, there is redundancy with respect to failures, and unnecessary adjustment time can be eliminated even for defective crystal units.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of a frequency adjustment device according to the related art.

FIG. 2 is an explanatory diagram of a first embodiment of the frequency adjustment device of the present invention.

FIG. 3 is an explanatory diagram of a second embodiment of the frequency adjustment device of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Adjustment room 2 Quartz crystal oscillator 6 Conveyance part 11 First coarse adjustment part 12 Second coarse adjustment part 13 Third coarse adjustment part 14 Fine adjustment part 15 Control part

Claims (3)

[Claims] 1. A frequency adjustment device for increasing or decreasing the mass of a surface electrode film of a piezoelectric element such as a crystal unit to adjust a frequency, and measuring a frequency before adjustment in a frequency adjustment device having a plurality of adjustment units. A frequency adjusting device, comprising: means for adjusting an adjustment amount in each of the adjusting units. 2. A method for uniformly adjusting an adjustment amount by a plurality of adjustment units, wherein each of the adjustment units measures a frequency before the adjustment, and calculates an equal adjustment amount by each of the adjustment units. The frequency adjusting device according to claim 1, further comprising: 3. A method for adjusting an adjustment amount evenly by a plurality of adjustment units, wherein a means for measuring a frequency in a first adjustment unit and transmitting a uniform adjustment amount to each adjustment unit is provided. The frequency adjustment device according to claim 1, wherein: