JPS6318763U - - Google Patents

Info

Publication number

JPS6318763U

JPS6318763U JP11225386U JP11225386U JPS6318763U JP S6318763 U JPS6318763 U JP S6318763U JP 11225386 U JP11225386 U JP 11225386U JP 11225386 U JP11225386 U JP 11225386U JP S6318763 U JPS6318763 U JP S6318763U

Authority

JP

Japan

Prior art keywords

ion beam

ion

sample surface

processing apparatus

detectors

Prior art date

1986-07-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010884 ion-beam technique Methods 0.000 claims description 4
• 150000002500 ions Chemical class 0.000 claims 3
• 239000011248 coating agent Substances 0.000 claims 1
• 238000000576 coating method Methods 0.000 claims 1
• 230000005284 excitation Effects 0.000 claims 1
• 230000001678 irradiating effect Effects 0.000 claims 1
• 239000002994 raw material Substances 0.000 claims 1
• 238000005507 spraying Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000005259 measurement Methods 0.000 description 1

Cited By (4)