JPS63182528U - - Google Patents
Info
- Publication number
- JPS63182528U JPS63182528U JP6284188U JP6284188U JPS63182528U JP S63182528 U JPS63182528 U JP S63182528U JP 6284188 U JP6284188 U JP 6284188U JP 6284188 U JP6284188 U JP 6284188U JP S63182528 U JPS63182528 U JP S63182528U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- ion beam
- oxygen ion
- organic layer
- exposing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000001301 oxygen Substances 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
- 238000010884 ion-beam technique Methods 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 4
- 239000012044 organic layer Substances 0.000 claims description 4
- 238000000059 patterning Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6284188U JPS63182528U (enExample) | 1988-05-12 | 1988-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6284188U JPS63182528U (enExample) | 1988-05-12 | 1988-05-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63182528U true JPS63182528U (enExample) | 1988-11-24 |
Family
ID=30897508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6284188U Pending JPS63182528U (enExample) | 1988-05-12 | 1988-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63182528U (enExample) |
-
1988
- 1988-05-12 JP JP6284188U patent/JPS63182528U/ja active Pending
Non-Patent Citations (2)
| Title |
|---|
| APPL.PHYS.LETT=1979 * |
| THE BELL SYSTEM TECHNICAL JOURNAL=1979 * |
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