JPS6318245A - 微粒子計測装置 - Google Patents

微粒子計測装置

Info

Publication number
JPS6318245A
JPS6318245A JP61162588A JP16258886A JPS6318245A JP S6318245 A JPS6318245 A JP S6318245A JP 61162588 A JP61162588 A JP 61162588A JP 16258886 A JP16258886 A JP 16258886A JP S6318245 A JPS6318245 A JP S6318245A
Authority
JP
Japan
Prior art keywords
light
wavelength
particle
particles
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61162588A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0466310B2 (enrdf_load_stackoverflow
Inventor
Tamio Hoshina
星名　民雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rion Co Ltd
Original Assignee
Rion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rion Co Ltd filed Critical Rion Co Ltd
Priority to JP61162588A priority Critical patent/JPS6318245A/ja
Publication of JPS6318245A publication Critical patent/JPS6318245A/ja
Publication of JPH0466310B2 publication Critical patent/JPH0466310B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
JP61162588A 1986-07-10 1986-07-10 微粒子計測装置 Granted JPS6318245A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61162588A JPS6318245A (ja) 1986-07-10 1986-07-10 微粒子計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61162588A JPS6318245A (ja) 1986-07-10 1986-07-10 微粒子計測装置

Publications (2)

Publication Number Publication Date
JPS6318245A true JPS6318245A (ja) 1988-01-26
JPH0466310B2 JPH0466310B2 (enrdf_load_stackoverflow) 1992-10-22

Family

ID=15757443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61162588A Granted JPS6318245A (ja) 1986-07-10 1986-07-10 微粒子計測装置

Country Status (1)

Country Link
JP (1) JPS6318245A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01196536A (ja) * 1988-02-01 1989-08-08 Canon Inc 粒子解析装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143249A (ja) * 1982-02-19 1983-08-25 Toshiba Corp 欠陥検査装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143249A (ja) * 1982-02-19 1983-08-25 Toshiba Corp 欠陥検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01196536A (ja) * 1988-02-01 1989-08-08 Canon Inc 粒子解析装置

Also Published As

Publication number Publication date
JPH0466310B2 (enrdf_load_stackoverflow) 1992-10-22

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