JPS63176369A - 酸窒化けい素質焼結体の製造法 - Google Patents
酸窒化けい素質焼結体の製造法Info
- Publication number
- JPS63176369A JPS63176369A JP62004636A JP463687A JPS63176369A JP S63176369 A JPS63176369 A JP S63176369A JP 62004636 A JP62004636 A JP 62004636A JP 463687 A JP463687 A JP 463687A JP S63176369 A JPS63176369 A JP S63176369A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- silica
- mixture
- silicon nitride
- mol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 12
- 239000010703 silicon Substances 0.000 title claims description 12
- 229910052710 silicon Inorganic materials 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 42
- 239000000377 silicon dioxide Substances 0.000 claims description 21
- 238000005245 sintering Methods 0.000 claims description 20
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 18
- 239000000843 powder Substances 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 15
- 239000002994 raw material Substances 0.000 claims description 8
- 238000005979 thermal decomposition reaction Methods 0.000 claims description 8
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910052747 lanthanoid Inorganic materials 0.000 claims description 2
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims 2
- 150000002602 lanthanoids Chemical class 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000002706 hydrostatic effect Effects 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 238000001272 pressureless sintering Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000004580 weight loss Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- -1 lanthanide metal oxides Chemical class 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 150000003891 oxalate salts Chemical class 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62004636A JPS63176369A (ja) | 1987-01-12 | 1987-01-12 | 酸窒化けい素質焼結体の製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62004636A JPS63176369A (ja) | 1987-01-12 | 1987-01-12 | 酸窒化けい素質焼結体の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63176369A true JPS63176369A (ja) | 1988-07-20 |
| JPH0427187B2 JPH0427187B2 (enrdf_load_stackoverflow) | 1992-05-11 |
Family
ID=11589490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62004636A Granted JPS63176369A (ja) | 1987-01-12 | 1987-01-12 | 酸窒化けい素質焼結体の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63176369A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63270360A (ja) * | 1987-04-28 | 1988-11-08 | Agency Of Ind Science & Technol | 高密度酸窒化ケイ素焼結体とその製造法 |
-
1987
- 1987-01-12 JP JP62004636A patent/JPS63176369A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63270360A (ja) * | 1987-04-28 | 1988-11-08 | Agency Of Ind Science & Technol | 高密度酸窒化ケイ素焼結体とその製造法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0427187B2 (enrdf_load_stackoverflow) | 1992-05-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |