JPS6317589B2 - - Google Patents

Info

Publication number
JPS6317589B2
JPS6317589B2 JP54002453A JP245379A JPS6317589B2 JP S6317589 B2 JPS6317589 B2 JP S6317589B2 JP 54002453 A JP54002453 A JP 54002453A JP 245379 A JP245379 A JP 245379A JP S6317589 B2 JPS6317589 B2 JP S6317589B2
Authority
JP
Japan
Prior art keywords
substrate
workpiece
water
wax
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54002453A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5596267A (en
Inventor
Katsura Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP245379A priority Critical patent/JPS5596267A/ja
Publication of JPS5596267A publication Critical patent/JPS5596267A/ja
Publication of JPS6317589B2 publication Critical patent/JPS6317589B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP245379A 1979-01-12 1979-01-12 Parts working method Granted JPS5596267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP245379A JPS5596267A (en) 1979-01-12 1979-01-12 Parts working method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP245379A JPS5596267A (en) 1979-01-12 1979-01-12 Parts working method

Publications (2)

Publication Number Publication Date
JPS5596267A JPS5596267A (en) 1980-07-22
JPS6317589B2 true JPS6317589B2 (enExample) 1988-04-14

Family

ID=11529698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP245379A Granted JPS5596267A (en) 1979-01-12 1979-01-12 Parts working method

Country Status (1)

Country Link
JP (1) JPS5596267A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58137555A (ja) * 1982-02-09 1983-08-16 Kyocera Corp 研摩盤とそれを用いた研摩方法
DE102006021647A1 (de) 2005-11-09 2007-11-15 Coenen, Wolfgang, Dipl.-Ing. Verfahren zur Vereinzelung von scheibenförmigen Substraten unter Nutzung von Adhäsionskräften

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5911423B2 (ja) * 1974-04-10 1984-03-15 株式会社日立製作所 ラツピング装置

Also Published As

Publication number Publication date
JPS5596267A (en) 1980-07-22

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