JPS6316993Y2 - - Google Patents
Info
- Publication number
- JPS6316993Y2 JPS6316993Y2 JP7628381U JP7628381U JPS6316993Y2 JP S6316993 Y2 JPS6316993 Y2 JP S6316993Y2 JP 7628381 U JP7628381 U JP 7628381U JP 7628381 U JP7628381 U JP 7628381U JP S6316993 Y2 JPS6316993 Y2 JP S6316993Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- fixed
- displacement
- electrodes
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 37
- 239000002184 metal Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7628381U JPS6316993Y2 (fr) | 1981-05-25 | 1981-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7628381U JPS6316993Y2 (fr) | 1981-05-25 | 1981-05-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57186808U JPS57186808U (fr) | 1982-11-27 |
| JPS6316993Y2 true JPS6316993Y2 (fr) | 1988-05-13 |
Family
ID=29871976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7628381U Expired JPS6316993Y2 (fr) | 1981-05-25 | 1981-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6316993Y2 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101410690B (zh) * | 2006-02-21 | 2011-11-23 | 赛博光学半导体公司 | 半导体加工工具中的电容性距离感测 |
-
1981
- 1981-05-25 JP JP7628381U patent/JPS6316993Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57186808U (fr) | 1982-11-27 |
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