JPS63169731A - Tool holding mechanism for bonder - Google Patents

Abstract

PURPOSE:To make the title holding mechanism to correspond to the inclination of a bonding surface in a sample without adjustment by constituting the title holding mechanism of a mounting fixed to a tool holding section or a bonder and a tool holder, one end of which is fastened to said mounting and to the other end of which a tool is settled and to an intermediate section of which an elastic section is formed. CONSTITUTION:An expanding slot 5f is shaped at the center of the upper end of a tool holder 5. The shaft section 7a of a tool 7 is inserted into the hole 5d of the tool holder 5, and fixed to the tool holder 5 by a screw 8. An elastic section 5h to which a spiral groove 5g is formed is set up to the intermediate section of the shaft section 5a of the tool holder 5. Accordingly, since the elastic section 5h is shaped between one end fastened to a mounting 3 and the other end, to which the tool 7 is settled in the tool holder 5, the elastic section 5h can be deformed elastically so as to enable the lower surface of the tool 7 to follow a bonding surface when the bonding surface is inclined when the mounting 3 is lowered and the tool 7 pushes the bonding surface of a sample.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a tool holding mechanism used in tape bonders (inner lead bonders and outer lead bonders), pellet bonders, and the like.

[Prior Art] Conventionally, a tool holder to which a tool is fixed can be adjusted in an X direction horizontal to the tool holding portion of a bonder and in a horizontal Y direction perpendicular to this X direction using adjustment screws.
and is fixed with a fixing screw.

Therefore, the lower surface of the tool and the pound stage are aligned parallel to each other using adjustment screws in the X and Y directions, and then the tool holder is fixed to the tool holding portion using a fixing screw.

[Problems to be Solved by the Invention] In the above-mentioned prior art, the parallelization of the tool is performed by delicate movement of the adjustment screw, so it is difficult to parallelize the tool and requires a large amount of adjustment time. In addition, the tool had no degree of freedom, and it was not possible to perform good bonding with tilted samples.

SUMMARY OF THE INVENTION An object of the present invention is to provide a bonder tool holding mechanism that allows easy parallelization of the tool and can accommodate the inclination of the bonding surface of a sample without adjustment.

[Means for Solving the Problems] The problems of the above-mentioned conventional technology are that the mounting body is fixed to the tool holding portion of the bonder, one end is fixed to the mounting body, the tool is fixed to the other end, and the intermediate This problem can be solved by constructing a tool holder in which an elastic part is formed on the part.

[Function] Since the tool holder has an elastic part formed between the part fixed to the mounting body and the part fixed to the tool, it can be tilted in any direction using the part fixed to the mounting body as a fulcrum. The underside of the tool can always follow any inclination of the bonding surface.

[Embodiment] Hereinafter, an embodiment of the present invention will be explained with reference to FIGS. A tool holding section 2 that can be moved is provided so as to be movable up and down. An L-shaped mounting body 3 is fixed to the tool holding portion 2 with screws 4.

The shaft portion 5a of the tool holder 5 is inserted into the flat surface of the mounting body 3 so as to protrude upward from the bottom surface of the mounting body 3, and the flange portion 5b of the tool holder 5 is fixed to the mounting body 3 with screws 6. ing. In the center of the tool holder 5 is a hole 5C that is slightly larger than the shaft portion 7a of the tool 7, extending from the bottom to the top.
However, a hole 5d into which the shaft portion 7a is inserted is formed above the hole 5d, and a hole 5e smaller than the shaft portion 7a is formed above the hole 5d.

Further, a split groove 5f is formed at the center of the upper end of the tool holder 5. Then, the shaft part 7a of the tool 7 is inserted into the hole 5d of the tool holder 5, and the screw 8 is inserted into the tool holder 5.
is fixed. In addition, the shaft portion 5a of the tool holder 5 has an elastic portion 5h formed with a spiral groove 5g in the middle portion thereof.

In this way, the tool holder 5 has an elastic portion 5h formed between one end fixed to the attachment body 3 and the other end to which the tool 7 is fixed, so that the attachment body 3 is lowered and the tool When the tool 7 presses the bonding surface of the sample, if the bonding surface is inclined, the elastic portion 5h can be elastically deformed so that the lower surface of the tool 7 follows the bonding surface.

FIG. 4 shows a second embodiment of the present invention. In this embodiment, the tool holder 5 of the first embodiment is fixed to the mounting body 3 upside down. Even when used in this manner, the same effects as in the above embodiment can be obtained.

5 to 8 show a third embodiment of the present invention. In this embodiment, a plurality of vertical grooves 51 are formed in the tool holder 5 to serve as an elastic portion 5h.

FIG. 9 shows a fourth embodiment of the present invention, in which the tool holder 5 of the third embodiment is used upside down.

Although the tool 7 in each of the above embodiments is illustrated as being used for a tape bonder, it may also be used for a pellet bonder. In this case, the tool 7 is provided with a suction hole for sucking pellets, and Needless to say, a vibrator connected to a vacuum device is connected to the upper end.

[Effects of the Invention] As is clear from the above description, according to the present invention, the bonding surface of the tool follows the bonding surface of the sample, so no adjustment is necessary just by attaching the tool to the tool holder. In addition, complete bonding can be performed even on tilted samples.

[Brief explanation of the drawing]

1 to 3 show one embodiment of the present invention, FIG. 1 is a front view, FIG. 2 is a side view, FIG. 3 is a plan view, and FIG. 4 is a second embodiment of the present invention. The front view shown. 5 to 8 show a third embodiment of the present invention, in which FIG. 5 is a front view and FIG. 6 is a central sectional view of FIG. 5. FIG. 7 is a plan view, FIG. 8 is a bottom view, and FIG. 9 is a front view showing a fourth embodiment of the present invention. 2: Tool holding part 5 3: Mounting body, 5: Tool holder, 5h: Elastic part. 7: Tools. Engraving of the drawings (no changes to the contents) Fig. 1 2: ・Sole Ray Itomukaku 3: I size on the shoulder I book 5: Enrule holder 5h: 3 mm・To 1 L anzu β 7:') - Le 2nd drawing Figure 3 Figure 5 Figure 7 Figure 8 Figure 5 Waalhol 9+- To Figure 9 h '=-,'' Procedural amendment (voluntary) January 29, 1985 Commissioner of the Japan Patent Office Black 1) Akio Tono 2 Title of the invention Bonder tool holding mechanism 3 Relationship with the case of the person making the amendment Patent applicant address 1 name, 2-51 Inadaira, Musashimurayama-shi, Tokyo Shinkawa Co., Ltd. Representative director Tsuyoshi Yasuno 4 Agent address Tokyo 2-20-2 Yoyogi, Shibuya-ku Drawing 6 Contents of amendment

Claims (1)

[Claims] It consists of a mounting body fixed to the tool holding part of the bonder, and a tool holder having one end fixed to the mounting body, a tool fixed to the other end, and an elastic part formed in the middle part, and the tool holder having an elastic part formed on the lower surface of the tool. A tool holding mechanism for a bonder, characterized in that the tool can be tilted to follow the bonding surface.