JPS6316964Y2 - - Google Patents
Info
- Publication number
- JPS6316964Y2 JPS6316964Y2 JP18127581U JP18127581U JPS6316964Y2 JP S6316964 Y2 JPS6316964 Y2 JP S6316964Y2 JP 18127581 U JP18127581 U JP 18127581U JP 18127581 U JP18127581 U JP 18127581U JP S6316964 Y2 JPS6316964 Y2 JP S6316964Y2
- Authority
- JP
- Japan
- Prior art keywords
- lens system
- sample
- light source
- point
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 description 13
- 238000000691 measurement method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18127581U JPS5886509U (ja) | 1981-12-04 | 1981-12-04 | 表面検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18127581U JPS5886509U (ja) | 1981-12-04 | 1981-12-04 | 表面検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5886509U JPS5886509U (ja) | 1983-06-11 |
| JPS6316964Y2 true JPS6316964Y2 (it) | 1988-05-13 |
Family
ID=29978606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18127581U Granted JPS5886509U (ja) | 1981-12-04 | 1981-12-04 | 表面検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5886509U (it) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3066816B1 (fr) * | 2017-05-24 | 2020-09-04 | Centre Nat Rech Scient | Dispositif optique de mesure de la courbure d'une surface reflechissante |
-
1981
- 1981-12-04 JP JP18127581U patent/JPS5886509U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5886509U (ja) | 1983-06-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4547073A (en) | Surface examining apparatus and method | |
| US6597446B2 (en) | Holographic scatterometer for detection and analysis of wafer surface deposits | |
| EP0856728B1 (en) | Optical method and apparatus for detecting defects | |
| JPH0695075B2 (ja) | 表面性状検出方法 | |
| Ishihara et al. | High-speed surface measurement using a non-scanning multiple-beam confocal microscope | |
| JPS6182147A (ja) | 表面検査方法及び装置 | |
| JPH09229819A (ja) | 光学断面を用いたレンズパラメーター測定方法および測定装置 | |
| JPS63261144A (ja) | 光学的ウエブモニター装置 | |
| JP6142996B2 (ja) | ビア形状測定装置及びビア検査装置 | |
| JPH0120405B2 (it) | ||
| JPS6316964Y2 (it) | ||
| JP3634985B2 (ja) | 光学的表面検査機構及び光学的表面検査装置 | |
| JPH06508218A (ja) | 広い測定範囲を有する偏向型光学装置 | |
| JPH0233089B2 (it) | ||
| JP2577960B2 (ja) | 鏡面体の表面検査装置 | |
| JPS60209106A (ja) | 平面度検査装置 | |
| JP2906745B2 (ja) | 表面うねり検査装置 | |
| JP2001083098A (ja) | 光学的表面検査機構及び光学的表面検査装置 | |
| JP3637165B2 (ja) | 表面測定装置 | |
| JPH03276005A (ja) | 形状測定装置 | |
| JPS6313446Y2 (it) | ||
| JP2982471B2 (ja) | 塗装面性状検査装置 | |
| JP2982474B2 (ja) | 塗装面性状検査装置 | |
| JPS6319001B2 (it) | ||
| JPH09218162A (ja) | 表面欠陥検査装置 |