JPS6316832U - - Google Patents

Info

Publication number
JPS6316832U
JPS6316832U JP10797586U JP10797586U JPS6316832U JP S6316832 U JPS6316832 U JP S6316832U JP 10797586 U JP10797586 U JP 10797586U JP 10797586 U JP10797586 U JP 10797586U JP S6316832 U JPS6316832 U JP S6316832U
Authority
JP
Japan
Prior art keywords
vacuum
evacuation
valve
vacuum processing
processing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10797586U
Other languages
English (en)
Other versions
JPH0532186Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986107975U priority Critical patent/JPH0532186Y2/ja
Publication of JPS6316832U publication Critical patent/JPS6316832U/ja
Application granted granted Critical
Publication of JPH0532186Y2 publication Critical patent/JPH0532186Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

【図面の簡単な説明】
第１図は、この考案の好適例を示す急速真空引
き装置の説明図である。 １……高真空処理槽、２……基板、３……基板
用電源、４……蒸発源、５……加熱用電源、６…
…シヤツター、７……アース、８……ロータリー
ポンプ、９……油拡散ポンプ、１０……真空タン
ク、１１……ロータリーポンプ、１２〜１７……
バルブ、１８，１９……圧力計。

Claims (1)

  1. 【実用新案登録請求の範囲】 高真空雰囲気を必要とする真空処理装置に付帯
    して該真空処理装置の排気を行う真空引き装置で
    あつて、 上記真空処理装置にバルブを介して連通し、該
    バルブを閉じているときは高真空に保たれ、バル
    ブを開いたときに真空処理装置の予備排気を行う
    真空タンクと、 上記真空処理装置にバルブを介して連通し、上
    記予備排気後の排気を行う真空ポンプとからなる
    急速真空引き装置。
JP1986107975U 1986-07-16 1986-07-16 Expired - Lifetime JPH0532186Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986107975U JPH0532186Y2 (ja) 1986-07-16 1986-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986107975U JPH0532186Y2 (ja) 1986-07-16 1986-07-16

Publications (2)

Publication Number Publication Date
JPS6316832U true JPS6316832U (ja) 1988-02-04
JPH0532186Y2 JPH0532186Y2 (ja) 1993-08-18

Family

ID=30984740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986107975U Expired - Lifetime JPH0532186Y2 (ja) 1986-07-16 1986-07-16

Country Status (1)

Country Link
JP (1) JPH0532186Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55116432A (en) * 1979-03-02 1980-09-08 Anelva Corp Vacuum apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55116432A (en) * 1979-03-02 1980-09-08 Anelva Corp Vacuum apparatus

Also Published As

Publication number Publication date
JPH0532186Y2 (ja) 1993-08-18

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