JPS63165764U - - Google Patents
Info
- Publication number
- JPS63165764U JPS63165764U JP5835287U JP5835287U JPS63165764U JP S63165764 U JPS63165764 U JP S63165764U JP 5835287 U JP5835287 U JP 5835287U JP 5835287 U JP5835287 U JP 5835287U JP S63165764 U JPS63165764 U JP S63165764U
- Authority
- JP
- Japan
- Prior art keywords
- slit
- electron beam
- opening
- cylindrical electrode
- inner cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5835287U JPS63165764U (US06521211-20030218-C00004.png) | 1987-04-17 | 1987-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5835287U JPS63165764U (US06521211-20030218-C00004.png) | 1987-04-17 | 1987-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63165764U true JPS63165764U (US06521211-20030218-C00004.png) | 1988-10-28 |
Family
ID=30888847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5835287U Pending JPS63165764U (US06521211-20030218-C00004.png) | 1987-04-17 | 1987-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63165764U (US06521211-20030218-C00004.png) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5580255A (en) * | 1978-12-12 | 1980-06-17 | Toshiba Corp | Charged particle beam processing device |
| JPS60172156A (ja) * | 1984-02-17 | 1985-09-05 | Anelva Corp | エネルギ−分析装置 |
-
1987
- 1987-04-17 JP JP5835287U patent/JPS63165764U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5580255A (en) * | 1978-12-12 | 1980-06-17 | Toshiba Corp | Charged particle beam processing device |
| JPS60172156A (ja) * | 1984-02-17 | 1985-09-05 | Anelva Corp | エネルギ−分析装置 |
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