JPS5580255A - Charged particle beam processing device - Google Patents

Charged particle beam processing device

Info

Publication number
JPS5580255A
JPS5580255A JP15353478A JP15353478A JPS5580255A JP S5580255 A JPS5580255 A JP S5580255A JP 15353478 A JP15353478 A JP 15353478A JP 15353478 A JP15353478 A JP 15353478A JP S5580255 A JPS5580255 A JP S5580255A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
holes
adjusting
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15353478A
Other languages
Japanese (ja)
Inventor
Kiyoshi Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15353478A priority Critical patent/JPS5580255A/en
Publication of JPS5580255A publication Critical patent/JPS5580255A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE: To improve the operating efficiency by constitution the device to be able to optionally change the holes through which charged particles enter and are emitted by means of an externally operable adjusting plate without breaking the vacuum.
CONSTITUTION: A fixed voltage is applied between electrodes 3 and 4 to form an electric field. An adjusting plate 10 is moved by operating an adjusting means 12 to align adjusting holes 7A and 8A with an incidence hole 7 and an emission hole 8, respectively, according to the purpose and precisely set the adjusting plate 10. When a charged particle beam 14 is introduced through the incidence hole 7, the beam is deflected by the electric field and passes through the emission hole 8, then collected by a detector 13. When the width of the incident charged particle beam is changed, other adjusting holes, for instance, holes 7B and 8B, are aligned with the incidence hole 7 and the emission hole 8, respectively, by operating, a flange 12B.
COPYRIGHT: (C)1980,JPO&Japio
JP15353478A 1978-12-12 1978-12-12 Charged particle beam processing device Pending JPS5580255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15353478A JPS5580255A (en) 1978-12-12 1978-12-12 Charged particle beam processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15353478A JPS5580255A (en) 1978-12-12 1978-12-12 Charged particle beam processing device

Publications (1)

Publication Number Publication Date
JPS5580255A true JPS5580255A (en) 1980-06-17

Family

ID=15564612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15353478A Pending JPS5580255A (en) 1978-12-12 1978-12-12 Charged particle beam processing device

Country Status (1)

Country Link
JP (1) JPS5580255A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63165764U (en) * 1987-04-17 1988-10-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63165764U (en) * 1987-04-17 1988-10-28

Similar Documents

Publication Publication Date Title
JPS63276862A (en) Mass spectrometer for cations and anions
JPS5516321A (en) Electrostatic radiant type electronic gun
GB1450498A (en) Apparatus for determining the energy of charged particles
GB982669A (en) Improvements in or relating to electron beam generators
JPS5580255A (en) Charged particle beam processing device
JPS54104385A (en) Ion-electron compound analytical apparatus
JPS531593A (en) Charged particle energy analyzer
JPH0334253A (en) Ion detector
GB1303136A (en)
GB1387173A (en) Energy analyzer of the coaxial cylindrical type
JPS54156546A (en) Corona charger
JPH02183960A (en) Post acceleration detector for mass spectrometer
Orient et al. Reversal ion source: A new source of negative ion beams
JPS5436990A (en) Charged particle energy analyzing apparatus
JPS6419664A (en) Ion beam device
JPS57107550A (en) Ion detector for mass spectrograph
Orient et al. A, Chutjian, and E
JPS57115752A (en) Ion detector for mass spectrograph
JPS51119287A (en) Recutangular-shape beam ion source
JPS5629182A (en) Detector for atomic beam
SU830597A1 (en) Method of detecting signal in scanning electron microscope
JPS5765660A (en) Ion beam device
OTTINGER et al. Microstability of a focussed ion beam propagating through a Z-pinch plasma[Interim Report]
JPS5684853A (en) Face structure of member located close to electron beam path
Muzukin et al. The characteristics of an ion flow from a cathode spot of a vacuum arc