JPS63163104A - 膜厚測定装置 - Google Patents

膜厚測定装置

Info

Publication number
JPS63163104A
JPS63163104A JP31349486A JP31349486A JPS63163104A JP S63163104 A JPS63163104 A JP S63163104A JP 31349486 A JP31349486 A JP 31349486A JP 31349486 A JP31349486 A JP 31349486A JP S63163104 A JPS63163104 A JP S63163104A
Authority
JP
Japan
Prior art keywords
time
resetting
measured
image sensor
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31349486A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444202B2 (enrdf_load_stackoverflow
Inventor
Isao Hishikari
功 菱刈
Toshihiko Ide
敏彦 井手
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP31349486A priority Critical patent/JPS63163104A/ja
Publication of JPS63163104A publication Critical patent/JPS63163104A/ja
Publication of JPH0444202B2 publication Critical patent/JPH0444202B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP31349486A 1986-12-25 1986-12-25 膜厚測定装置 Granted JPS63163104A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31349486A JPS63163104A (ja) 1986-12-25 1986-12-25 膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31349486A JPS63163104A (ja) 1986-12-25 1986-12-25 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS63163104A true JPS63163104A (ja) 1988-07-06
JPH0444202B2 JPH0444202B2 (enrdf_load_stackoverflow) 1992-07-21

Family

ID=18041985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31349486A Granted JPS63163104A (ja) 1986-12-25 1986-12-25 膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS63163104A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0444202B2 (enrdf_load_stackoverflow) 1992-07-21

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