JPS63162991U - - Google Patents

Info

Publication number
JPS63162991U
JPS63162991U JP5482287U JP5482287U JPS63162991U JP S63162991 U JPS63162991 U JP S63162991U JP 5482287 U JP5482287 U JP 5482287U JP 5482287 U JP5482287 U JP 5482287U JP S63162991 U JPS63162991 U JP S63162991U
Authority
JP
Japan
Prior art keywords
rotor body
stator vane
outer cylinder
bent portion
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5482287U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5482287U priority Critical patent/JPS63162991U/ja
Publication of JPS63162991U publication Critical patent/JPS63162991U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例に用いられる静翼段
の斜視図、第２図は同実施例に用いられる静翼の
説明図、第３図は同実施例の要部の断面図、第４
図は同実施例における気体分子の運動の説明図、
第５図は従来のターボ分子ポンプ静翼の説明図、
第６図は従来のターボ分子ポンプの断面図、第７
図は従来のターボ分子ポンプにおける気体分子の
運動の説明図である。 図面中、１は静翼リング部、２は静翼、３は静
翼々端部の折り曲げ部、４はロータ回転胴、５は
ポンプ外筒、６は動翼、をそれぞれ示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. ポンプ外筒に取付けられ内方に放射状にロータ
    回転胴に向つて伸びる静翼の翼部に、ロータ回転
    胴に沿う折り曲げ部を設けたことを特徴とするタ
    ーボ分子ポンプ。
JP5482287U 1987-04-13 1987-04-13 Pending JPS63162991U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5482287U JPS63162991U (ja) 1987-04-13 1987-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5482287U JPS63162991U (ja) 1987-04-13 1987-04-13

Publications (1)

Publication Number Publication Date
JPS63162991U true JPS63162991U (ja) 1988-10-25

Family

ID=30882169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5482287U Pending JPS63162991U (ja) 1987-04-13 1987-04-13

Country Status (1)

Country Link
JP (1) JPS63162991U (ja)

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