JPS63162320U - - Google Patents

Info

Publication number
JPS63162320U
JPS63162320U JP5340887U JP5340887U JPS63162320U JP S63162320 U JPS63162320 U JP S63162320U JP 5340887 U JP5340887 U JP 5340887U JP 5340887 U JP5340887 U JP 5340887U JP S63162320 U JPS63162320 U JP S63162320U
Authority
JP
Japan
Prior art keywords
reflecting mirror
rotating surface
surface reflecting
focal point
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5340887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5340887U priority Critical patent/JPS63162320U/ja
Publication of JPS63162320U publication Critical patent/JPS63162320U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Optical Elements Other Than Lenses (AREA)
JP5340887U 1987-04-10 1987-04-10 Pending JPS63162320U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5340887U JPS63162320U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5340887U JPS63162320U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Publications (1)

Publication Number Publication Date
JPS63162320U true JPS63162320U (enrdf_load_stackoverflow) 1988-10-24

Family

ID=30879445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5340887U Pending JPS63162320U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Country Status (1)

Country Link
JP (1) JPS63162320U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002031894A (ja) * 2000-07-18 2002-01-31 Topcon Corp 露光装置の照明光学系
EP1965253A1 (en) 2007-02-27 2008-09-03 Ushiodenki Kabushiki Kaisha Discharge lamp with concave reflector

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58160914A (ja) * 1982-03-18 1983-09-24 Nippon Kogaku Kk <Nikon> ミラ−集光型照明光学系

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58160914A (ja) * 1982-03-18 1983-09-24 Nippon Kogaku Kk <Nikon> ミラ−集光型照明光学系

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002031894A (ja) * 2000-07-18 2002-01-31 Topcon Corp 露光装置の照明光学系
EP1965253A1 (en) 2007-02-27 2008-09-03 Ushiodenki Kabushiki Kaisha Discharge lamp with concave reflector
US7588352B2 (en) 2007-02-27 2009-09-15 Ushiodenki Kabushiki Kaisha Optical apparatus

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