JPS63155674A - 分布型圧覚センサ - Google Patents
分布型圧覚センサInfo
- Publication number
- JPS63155674A JPS63155674A JP30118186A JP30118186A JPS63155674A JP S63155674 A JPS63155674 A JP S63155674A JP 30118186 A JP30118186 A JP 30118186A JP 30118186 A JP30118186 A JP 30118186A JP S63155674 A JPS63155674 A JP S63155674A
- Authority
- JP
- Japan
- Prior art keywords
- silicon plate
- strain gauge
- pressure sensor
- elastic body
- crystal silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 22
- 239000004065 semiconductor Substances 0.000 claims abstract description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract 5
- 229910052710 silicon Inorganic materials 0.000 claims abstract 5
- 239000010703 silicon Substances 0.000 claims abstract 5
- 230000008859 change Effects 0.000 claims description 9
- 239000013013 elastic material Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 239000004033 plastic Substances 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 abstract description 3
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 abstract 2
- 230000005489 elastic deformation Effects 0.000 abstract 1
- 230000035807 sensation Effects 0.000 abstract 1
- 238000005476 soldering Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 235000006716 Broussonetia kazinoki Nutrition 0.000 description 1
- 240000006248 Broussonetia kazinoki Species 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30118186A JPS63155674A (ja) | 1986-12-19 | 1986-12-19 | 分布型圧覚センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30118186A JPS63155674A (ja) | 1986-12-19 | 1986-12-19 | 分布型圧覚センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63155674A true JPS63155674A (ja) | 1988-06-28 |
| JPH0558675B2 JPH0558675B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-27 |
Family
ID=17893753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30118186A Granted JPS63155674A (ja) | 1986-12-19 | 1986-12-19 | 分布型圧覚センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63155674A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0267936A (ja) * | 1988-07-14 | 1990-03-07 | Blomberg Robotertecknik Gmbh | 触覚センサ |
| JPH02223835A (ja) * | 1989-02-27 | 1990-09-06 | Agency Of Ind Science & Technol | 分布型圧覚センサ |
| JPH03113334A (ja) * | 1989-09-28 | 1991-05-14 | Fuji Electric Corp Res & Dev Ltd | 接触覚センサ |
| JP2006275979A (ja) * | 2005-03-30 | 2006-10-12 | National Institute Of Information & Communication Technology | センサ素子、センサ装置、対象物移動制御装置、対象物判別装置 |
| JP2016506520A (ja) * | 2012-12-24 | 2016-03-03 | フレセニウス メディカル ケア ホールディングス インコーポレーテッド | 透析装置リザーバのための荷重懸架及び計量システム |
-
1986
- 1986-12-19 JP JP30118186A patent/JPS63155674A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0267936A (ja) * | 1988-07-14 | 1990-03-07 | Blomberg Robotertecknik Gmbh | 触覚センサ |
| JPH02223835A (ja) * | 1989-02-27 | 1990-09-06 | Agency Of Ind Science & Technol | 分布型圧覚センサ |
| JPH03113334A (ja) * | 1989-09-28 | 1991-05-14 | Fuji Electric Corp Res & Dev Ltd | 接触覚センサ |
| JP2006275979A (ja) * | 2005-03-30 | 2006-10-12 | National Institute Of Information & Communication Technology | センサ素子、センサ装置、対象物移動制御装置、対象物判別装置 |
| JP2016506520A (ja) * | 2012-12-24 | 2016-03-03 | フレセニウス メディカル ケア ホールディングス インコーポレーテッド | 透析装置リザーバのための荷重懸架及び計量システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0558675B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |