JPS63142840U - - Google Patents

Info

Publication number
JPS63142840U
JPS63142840U JP3471287U JP3471287U JPS63142840U JP S63142840 U JPS63142840 U JP S63142840U JP 3471287 U JP3471287 U JP 3471287U JP 3471287 U JP3471287 U JP 3471287U JP S63142840 U JPS63142840 U JP S63142840U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
wafers
wafer
held
storage container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3471287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3471287U priority Critical patent/JPS63142840U/ja
Publication of JPS63142840U publication Critical patent/JPS63142840U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
JP3471287U 1987-03-09 1987-03-09 Pending JPS63142840U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3471287U JPS63142840U (enrdf_load_stackoverflow) 1987-03-09 1987-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3471287U JPS63142840U (enrdf_load_stackoverflow) 1987-03-09 1987-03-09

Publications (1)

Publication Number Publication Date
JPS63142840U true JPS63142840U (enrdf_load_stackoverflow) 1988-09-20

Family

ID=30843523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3471287U Pending JPS63142840U (enrdf_load_stackoverflow) 1987-03-09 1987-03-09

Country Status (1)

Country Link
JP (1) JPS63142840U (enrdf_load_stackoverflow)

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