JPS63142840U - - Google Patents
Info
- Publication number
- JPS63142840U JPS63142840U JP3471287U JP3471287U JPS63142840U JP S63142840 U JPS63142840 U JP S63142840U JP 3471287 U JP3471287 U JP 3471287U JP 3471287 U JP3471287 U JP 3471287U JP S63142840 U JPS63142840 U JP S63142840U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- wafers
- wafer
- held
- storage container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 9
- 210000000078 claw Anatomy 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Pile Receivers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3471287U JPS63142840U (enrdf_load_stackoverflow) | 1987-03-09 | 1987-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3471287U JPS63142840U (enrdf_load_stackoverflow) | 1987-03-09 | 1987-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63142840U true JPS63142840U (enrdf_load_stackoverflow) | 1988-09-20 |
Family
ID=30843523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3471287U Pending JPS63142840U (enrdf_load_stackoverflow) | 1987-03-09 | 1987-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63142840U (enrdf_load_stackoverflow) |
-
1987
- 1987-03-09 JP JP3471287U patent/JPS63142840U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0247046U (enrdf_load_stackoverflow) | ||
| JPH01104022U (enrdf_load_stackoverflow) | ||
| JPS63142840U (enrdf_load_stackoverflow) | ||
| JPS63188947U (enrdf_load_stackoverflow) | ||
| JP2654217B2 (ja) | ウェーハ移載方法 | |
| JPS63276239A (ja) | ウエハキャリア治具 | |
| JPH0390445U (enrdf_load_stackoverflow) | ||
| JPS61228647A (ja) | ウエハ並べ換え装置 | |
| JPH0110933Y2 (enrdf_load_stackoverflow) | ||
| JPH0332418U (enrdf_load_stackoverflow) | ||
| JPS6311727Y2 (enrdf_load_stackoverflow) | ||
| JPS58148098A (ja) | 板材の反転方法及びその反転治具 | |
| JPH0353774Y2 (enrdf_load_stackoverflow) | ||
| JPH054275Y2 (enrdf_load_stackoverflow) | ||
| JPS6390146A (ja) | 基板の移しかえ装置 | |
| JPS6219740U (enrdf_load_stackoverflow) | ||
| JPS5940770Y2 (ja) | ウエハキヤリヤ | |
| JPH0834236B2 (ja) | ウェハのロ−ディング装置 | |
| JPS5875226U (ja) | 表面処理装置用ワ−ク搬送装置 | |
| JPH0325903Y2 (enrdf_load_stackoverflow) | ||
| JPS61136841A (ja) | 半導体ウエハ−等の取出移送装置 | |
| JPS6311718Y2 (enrdf_load_stackoverflow) | ||
| JPH0650347U (ja) | ウエハ用カセット | |
| JPH03206640A (ja) | ウエハ移載装置 | |
| JPS6197842U (enrdf_load_stackoverflow) |