JPS6197842U - - Google Patents

Info

Publication number
JPS6197842U
JPS6197842U JP18756585U JP18756585U JPS6197842U JP S6197842 U JPS6197842 U JP S6197842U JP 18756585 U JP18756585 U JP 18756585U JP 18756585 U JP18756585 U JP 18756585U JP S6197842 U JPS6197842 U JP S6197842U
Authority
JP
Japan
Prior art keywords
wafer
wafers
basket
storage container
rotary table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18756585U
Other languages
English (en)
Japanese (ja)
Other versions
JPS629727Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18756585U priority Critical patent/JPS629727Y2/ja
Publication of JPS6197842U publication Critical patent/JPS6197842U/ja
Application granted granted Critical
Publication of JPS629727Y2 publication Critical patent/JPS629727Y2/ja
Expired legal-status Critical Current

Links

JP18756585U 1985-12-05 1985-12-05 Expired JPS629727Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18756585U JPS629727Y2 (enrdf_load_stackoverflow) 1985-12-05 1985-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18756585U JPS629727Y2 (enrdf_load_stackoverflow) 1985-12-05 1985-12-05

Publications (2)

Publication Number Publication Date
JPS6197842U true JPS6197842U (enrdf_load_stackoverflow) 1986-06-23
JPS629727Y2 JPS629727Y2 (enrdf_load_stackoverflow) 1987-03-06

Family

ID=30745026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18756585U Expired JPS629727Y2 (enrdf_load_stackoverflow) 1985-12-05 1985-12-05

Country Status (1)

Country Link
JP (1) JPS629727Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016213459A (ja) * 2015-04-30 2016-12-15 環球晶圓股▲ふん▼有限公司 ウエハ移し換え装置及びウエハ移し換え方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016213459A (ja) * 2015-04-30 2016-12-15 環球晶圓股▲ふん▼有限公司 ウエハ移し換え装置及びウエハ移し換え方法

Also Published As

Publication number Publication date
JPS629727Y2 (enrdf_load_stackoverflow) 1987-03-06

Similar Documents

Publication Publication Date Title
US4686813A (en) Robot system for encasing cone-like articles
JP2687253B2 (ja) 卵移送用供給装置
JPH0355983B2 (enrdf_load_stackoverflow)
TW200416188A (en) Device and method for transporting wafer-shaped articles
DE3173168D1 (en) Automatic tool changing device adaptable to be mounted on machine tools having a vertical or horizontal spindle, and automatic means for handling and positioning these tools in the spindles of machine tools
US4833770A (en) Flexible manufacturing system for machining workpieces
JP3745064B2 (ja) 基板搬送装置およびそれを用いた基板搬送方法ならびに基板姿勢変換装置
JPS6197842U (enrdf_load_stackoverflow)
CA2207719A1 (en) Data carrier storage system
JPS63188947U (enrdf_load_stackoverflow)
JPS6145381B2 (enrdf_load_stackoverflow)
JP2675164B2 (ja) ウエハキャリヤの格納装置兼輸送装置
JP7222059B2 (ja) 保持ハンド及び物品収納方法
JPH0648851Y2 (ja) ウェーハ立替機
JPS6236286Y2 (enrdf_load_stackoverflow)
JP2518883Y2 (ja) 集積反転装置
JPS588714Y2 (ja) 缶蓋自動供給装置
JP3283779B2 (ja) 円板状基板のチャック装置
JPS63139000A (ja) ホルダからの容器の抜取り装置
JPH0412660Y2 (enrdf_load_stackoverflow)
JPS59124204A (ja) 棒状部材の箱詰め装置
JPH0244198Y2 (enrdf_load_stackoverflow)
JPH0695548B2 (ja) ウエハー等の移替装置
JPS6455837A (en) Semiconductor wafer transferring apparatus
JPH04748U (enrdf_load_stackoverflow)