JPS63142825U - - Google Patents
Info
- Publication number
- JPS63142825U JPS63142825U JP1987036199U JP3619987U JPS63142825U JP S63142825 U JPS63142825 U JP S63142825U JP 1987036199 U JP1987036199 U JP 1987036199U JP 3619987 U JP3619987 U JP 3619987U JP S63142825 U JPS63142825 U JP S63142825U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- barrel
- vapor phase
- phase growth
- flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987036199U JPS63142825U (enExample) | 1987-03-12 | 1987-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987036199U JPS63142825U (enExample) | 1987-03-12 | 1987-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63142825U true JPS63142825U (enExample) | 1988-09-20 |
Family
ID=30846384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987036199U Pending JPS63142825U (enExample) | 1987-03-12 | 1987-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63142825U (enExample) |
-
1987
- 1987-03-12 JP JP1987036199U patent/JPS63142825U/ja active Pending