JPS6389230U - - Google Patents
Info
- Publication number
- JPS6389230U JPS6389230U JP18196886U JP18196886U JPS6389230U JP S6389230 U JPS6389230 U JP S6389230U JP 18196886 U JP18196886 U JP 18196886U JP 18196886 U JP18196886 U JP 18196886U JP S6389230 U JPS6389230 U JP S6389230U
- Authority
- JP
- Japan
- Prior art keywords
- heating coil
- susceptor
- reaction tube
- tube
- epitaxial growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000004804 winding Methods 0.000 claims description 3
Landscapes
- Constitution Of High-Frequency Heating (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986181968U JP2514846Y2 (ja) | 1986-11-28 | 1986-11-28 | Ｃｖｄエピタキシヤル成長装置用加熱コイル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986181968U JP2514846Y2 (ja) | 1986-11-28 | 1986-11-28 | Ｃｖｄエピタキシヤル成長装置用加熱コイル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6389230U true JPS6389230U (enExample) | 1988-06-10 |
| JP2514846Y2 JP2514846Y2 (ja) | 1996-10-23 |
Family
ID=31127334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986181968U Expired - Lifetime JP2514846Y2 (ja) | 1986-11-28 | 1986-11-28 | Ｃｖｄエピタキシヤル成長装置用加熱コイル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2514846Y2 (enExample) |
-
1986
- 1986-11-28 JP JP1986181968U patent/JP2514846Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2514846Y2 (ja) | 1996-10-23 |