JPS63140618U - - Google Patents
Info
- Publication number
- JPS63140618U JPS63140618U JP3252287U JP3252287U JPS63140618U JP S63140618 U JPS63140618 U JP S63140618U JP 3252287 U JP3252287 U JP 3252287U JP 3252287 U JP3252287 U JP 3252287U JP S63140618 U JPS63140618 U JP S63140618U
- Authority
- JP
- Japan
- Prior art keywords
- group
- gas
- vapor phase
- epitaxial growth
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 4
- 239000012808 vapor phase Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 239000002912 waste gas Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 2
- 239000002994 raw material Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000012159 carrier gas Substances 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 150000004678 hydrides Chemical class 0.000 claims 1
- 125000002524 organometallic group Chemical group 0.000 claims 1
- 238000000746 purification Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3252287U JPS63140618U (es) | 1987-03-05 | 1987-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3252287U JPS63140618U (es) | 1987-03-05 | 1987-03-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63140618U true JPS63140618U (es) | 1988-09-16 |
Family
ID=30839275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3252287U Pending JPS63140618U (es) | 1987-03-05 | 1987-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63140618U (es) |
-
1987
- 1987-03-05 JP JP3252287U patent/JPS63140618U/ja active Pending
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