JPS6382929U - - Google Patents
Info
- Publication number
- JPS6382929U JPS6382929U JP17815486U JP17815486U JPS6382929U JP S6382929 U JPS6382929 U JP S6382929U JP 17815486 U JP17815486 U JP 17815486U JP 17815486 U JP17815486 U JP 17815486U JP S6382929 U JPS6382929 U JP S6382929U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- circulation line
- reaction
- reaction tube
- chemical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17815486U JPS6382929U (es) | 1986-11-19 | 1986-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17815486U JPS6382929U (es) | 1986-11-19 | 1986-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6382929U true JPS6382929U (es) | 1988-05-31 |
Family
ID=31120026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17815486U Pending JPS6382929U (es) | 1986-11-19 | 1986-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6382929U (es) |
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1986
- 1986-11-19 JP JP17815486U patent/JPS6382929U/ja active Pending