JPS6342156U - - Google Patents
Info
- Publication number
- JPS6342156U JPS6342156U JP13685286U JP13685286U JPS6342156U JP S6342156 U JPS6342156 U JP S6342156U JP 13685286 U JP13685286 U JP 13685286U JP 13685286 U JP13685286 U JP 13685286U JP S6342156 U JPS6342156 U JP S6342156U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust line
- exhaust
- cold trap
- main
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008021 deposition Effects 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13685286U JPS6342156U (es) | 1986-09-06 | 1986-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13685286U JPS6342156U (es) | 1986-09-06 | 1986-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6342156U true JPS6342156U (es) | 1988-03-19 |
Family
ID=31040354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13685286U Pending JPS6342156U (es) | 1986-09-06 | 1986-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6342156U (es) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0551859A (ja) * | 1991-08-09 | 1993-03-02 | Hisaka Works Ltd | 布帛等の液流処理装置 |
| JPH0657615A (ja) * | 1992-08-10 | 1994-03-01 | Ito Kogyo Kk | スレや折れ、しわの発生しやすい素材布用の拡布液流処理装置 |
-
1986
- 1986-09-06 JP JP13685286U patent/JPS6342156U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0551859A (ja) * | 1991-08-09 | 1993-03-02 | Hisaka Works Ltd | 布帛等の液流処理装置 |
| JPH0657615A (ja) * | 1992-08-10 | 1994-03-01 | Ito Kogyo Kk | スレや折れ、しわの発生しやすい素材布用の拡布液流処理装置 |
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