JPH0222361U - - Google Patents
Info
- Publication number
- JPH0222361U JPH0222361U JP10036088U JP10036088U JPH0222361U JP H0222361 U JPH0222361 U JP H0222361U JP 10036088 U JP10036088 U JP 10036088U JP 10036088 U JP10036088 U JP 10036088U JP H0222361 U JPH0222361 U JP H0222361U
- Authority
- JP
- Japan
- Prior art keywords
- intake
- vacuum chamber
- forming apparatus
- film forming
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10036088U JPH0222361U (es) | 1988-07-28 | 1988-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10036088U JPH0222361U (es) | 1988-07-28 | 1988-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0222361U true JPH0222361U (es) | 1990-02-14 |
Family
ID=31328366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10036088U Pending JPH0222361U (es) | 1988-07-28 | 1988-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0222361U (es) |
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1988
- 1988-07-28 JP JP10036088U patent/JPH0222361U/ja active Pending