JPS63140072U - - Google Patents
Info
- Publication number
- JPS63140072U JPS63140072U JP3065887U JP3065887U JPS63140072U JP S63140072 U JPS63140072 U JP S63140072U JP 3065887 U JP3065887 U JP 3065887U JP 3065887 U JP3065887 U JP 3065887U JP S63140072 U JPS63140072 U JP S63140072U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- material solution
- substrate
- jig
- slide plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002994 raw material Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の化合物半導体結晶成長装置の
一実施例の説明図、第２図は同じく他の実施例の
説明図、第３図はグラフアイトの層状構造を示す
説明図である。 １，６：原料溶液溜治具、２：スライド板、３
：基板、４Ａ，４Ｂ，４Ｃ：原料溶液、５：支持
体。
一実施例の説明図、第２図は同じく他の実施例の
説明図、第３図はグラフアイトの層状構造を示す
説明図である。 １，６：原料溶液溜治具、２：スライド板、３
：基板、４Ａ，４Ｂ，４Ｃ：原料溶液、５：支持
体。
Claims (1)
- 原料溶液を収容する原料溶液溜治具と基板を設
置するスライド板とを備え前記原料溶液溜治具と
前記スライド板を相対的に移動して前記原料溶液
と前記基板とを接触させて前記基板上に化合物結
晶薄膜をエピタキシヤル成長させる化合物半導体
結晶成長装置において、前記原料溶液溜治具及び
前記スライド板が、成層格子の方向が前記基板の
移動方向と一致するグラフアイトよりなることを
特徴とする化合物半導体結晶成長装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987030658U JPH0543109Y2 (ja) | 1987-03-03 | 1987-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987030658U JPH0543109Y2 (ja) | 1987-03-03 | 1987-03-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63140072U true JPS63140072U (ja) | 1988-09-14 |
| JPH0543109Y2 JPH0543109Y2 (ja) | 1993-10-29 |
Family
ID=30835673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987030658U Expired - Lifetime JPH0543109Y2 (ja) | 1987-03-03 | 1987-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543109Y2 (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5329428A (en) * | 1976-08-30 | 1978-03-18 | Mitsubishi Electric Corp | Solenoid controlled system |
| JPS5391921A (en) * | 1977-01-24 | 1978-08-12 | Kogyo Gijutsuin | Process for making highly oriented graphite material |
-
1987
- 1987-03-03 JP JP1987030658U patent/JPH0543109Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5329428A (en) * | 1976-08-30 | 1978-03-18 | Mitsubishi Electric Corp | Solenoid controlled system |
| JPS5391921A (en) * | 1977-01-24 | 1978-08-12 | Kogyo Gijutsuin | Process for making highly oriented graphite material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543109Y2 (ja) | 1993-10-29 |
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