JPS63139754U - - Google Patents

Info

Publication number
JPS63139754U
JPS63139754U JP3239487U JP3239487U JPS63139754U JP S63139754 U JPS63139754 U JP S63139754U JP 3239487 U JP3239487 U JP 3239487U JP 3239487 U JP3239487 U JP 3239487U JP S63139754 U JPS63139754 U JP S63139754U
Authority
JP
Japan
Prior art keywords
refrigerant
emitter
tank
gas
recovery pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3239487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353404Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3239487U priority Critical patent/JPH0353404Y2/ja
Publication of JPS63139754U publication Critical patent/JPS63139754U/ja
Application granted granted Critical
Publication of JPH0353404Y2 publication Critical patent/JPH0353404Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Rigid Pipes And Flexible Pipes (AREA)
  • Electron Sources, Ion Sources (AREA)
JP3239487U 1987-03-05 1987-03-05 Expired JPH0353404Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3239487U JPH0353404Y2 (enrdf_load_stackoverflow) 1987-03-05 1987-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3239487U JPH0353404Y2 (enrdf_load_stackoverflow) 1987-03-05 1987-03-05

Publications (2)

Publication Number Publication Date
JPS63139754U true JPS63139754U (enrdf_load_stackoverflow) 1988-09-14
JPH0353404Y2 JPH0353404Y2 (enrdf_load_stackoverflow) 1991-11-21

Family

ID=30839029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3239487U Expired JPH0353404Y2 (enrdf_load_stackoverflow) 1987-03-05 1987-03-05

Country Status (1)

Country Link
JP (1) JPH0353404Y2 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置
JP2009289670A (ja) * 2008-05-30 2009-12-10 Hitachi High-Technologies Corp イオンビーム装置
WO2011001600A1 (ja) * 2009-06-30 2011-01-06 株式会社 日立ハイテクノロジーズ イオン顕微鏡
JP2015092496A (ja) * 2014-12-26 2015-05-14 株式会社日立ハイテクノロジーズ イオンビーム装置
JP2020129547A (ja) * 2020-04-22 2020-08-27 株式会社日立ハイテク ガリウム集束イオンビームとイオン顕微鏡複合装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009289670A (ja) * 2008-05-30 2009-12-10 Hitachi High-Technologies Corp イオンビーム装置
WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置
JP5097823B2 (ja) * 2008-06-05 2012-12-12 株式会社日立ハイテクノロジーズ イオンビーム装置
WO2011001600A1 (ja) * 2009-06-30 2011-01-06 株式会社 日立ハイテクノロジーズ イオン顕微鏡
JP2011014245A (ja) * 2009-06-30 2011-01-20 Hitachi High-Technologies Corp イオン顕微鏡
US8455841B2 (en) 2009-06-30 2013-06-04 Hitachi High-Technologies Corporation Ion microscope
JP2015092496A (ja) * 2014-12-26 2015-05-14 株式会社日立ハイテクノロジーズ イオンビーム装置
JP2020129547A (ja) * 2020-04-22 2020-08-27 株式会社日立ハイテク ガリウム集束イオンビームとイオン顕微鏡複合装置

Also Published As

Publication number Publication date
JPH0353404Y2 (enrdf_load_stackoverflow) 1991-11-21

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