JPS63137854U - - Google Patents

Info

Publication number
JPS63137854U
JPS63137854U JP2893487U JP2893487U JPS63137854U JP S63137854 U JPS63137854 U JP S63137854U JP 2893487 U JP2893487 U JP 2893487U JP 2893487 U JP2893487 U JP 2893487U JP S63137854 U JPS63137854 U JP S63137854U
Authority
JP
Japan
Prior art keywords
light beam
sample particles
screen
optical system
analysis device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2893487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2893487U priority Critical patent/JPS63137854U/ja
Publication of JPS63137854U publication Critical patent/JPS63137854U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2893487U 1987-02-28 1987-02-28 Pending JPS63137854U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2893487U JPS63137854U (enrdf_load_stackoverflow) 1987-02-28 1987-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2893487U JPS63137854U (enrdf_load_stackoverflow) 1987-02-28 1987-02-28

Publications (1)

Publication Number Publication Date
JPS63137854U true JPS63137854U (enrdf_load_stackoverflow) 1988-09-12

Family

ID=30832355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2893487U Pending JPS63137854U (enrdf_load_stackoverflow) 1987-02-28 1987-02-28

Country Status (1)

Country Link
JP (1) JPS63137854U (enrdf_load_stackoverflow)

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