JPS63137163A - Apparatus for forming composite film by vapor deposition with laser - Google Patents

Abstract

PURPOSE:To simply form various composite films, by erabling to separately evaporate different materials to be irradiated with laser beams in the same vacuum and to simultaneously deposit the generated particles. CONSTITUTION:Laser beams 1, 2 are concentrically radiated on different materials 7, 8 to be irradiated in vacuum to generate particles of the materials 7, 8 by evaporation. The particles are simultaneously deposited on a base material 9 placed at a prescribed position to form a composite film.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a laser vapor deposition type composite film forming apparatus that uses, for example, a C02 laser to vapor deposit different types of ceramics onto a base material to form a composite film. It is.

[Conventional technology]

Physical vapor deposition (PVD) is a technique for forming a film on a base material.
) method, chemical vapor deposition (CVD) B, mMiL, etc. 2 For example, Japanese Patent Application Laid-open No. 116373/1983 describes a laser vapor deposition apparatus. With these film-forming methods, methods for forming a film by combining two or more types of substances include a method in which heat treatment is performed after film formation and a composite film is formed by diffusion, and a method in which two or more types of substances to be film-formed are simultaneously deposited on a substrate. There is a way to supply it.

When heat treatment is performed after film formation, a composite film can be formed by maintaining the temperature in a temperature range where atoms in the film and atoms in other films or substrates can sufficiently interdiffuse and mix. can.

If two or more substances to be deposited are simultaneously supplied to the substrate, the vapor deposition substance supply source is a mixture of the two or more substances.
There is a method of simultaneously evaporating two or more substances and supplying them onto the substrate, and a method of separately evaporating two or more substances using two or more evaporation substance supply sources and simultaneously supplying them onto the substrate. Any composite membrane can be formed by controlling the ratio.

Among the above methods, in the method of performing heat treatment after film formation, the film and the base material are heated in a high temperature range where S can be damaged within the required range for interdiffusion of atoms (for ceramics, ρj is 130% for TiC).
It is necessary to maintain the temperature at around 0'c), and the quality of the membrane and base material (
For example, crystal structure) or properties (for example, strength) may change.

Furthermore, the composition and composition distribution of the resulting composite film cannot be controlled.

In the method of simultaneously supplying two or more substances to the substrate to form a film, when the vapor deposition material supply source is a mixture of two or more substances, the vapor deposition material is supplied so as to obtain a composite film with the desired composition and film quality. Source mixtures must be made with varying compositions.

Compared to these methods, among the methods of simultaneously retaining the substances to be evaporated onto the substrate, two or more evaporation substance supply sources are used to evaporate the substances to be evaporated separately and supply them onto the substrate at the same time. How?

This method is recommended as a method for forming composite films because the evaporative substance supply source material only needs to have a single composition, no heat treatment is required after film formation, and the assemblage and composition distribution can be controlled by controlling the evaporation rate and supply rate. This is the method that allows the most control over film quality.

[Problem that the invention seeks to solve]

However, if two or more vapor deposition material sources are installed in one chamber, The configuration becomes complicated and expensive, and control of the vapor deposition conditions 9, such as the vapor deposition atmosphere, becomes complicated. The substances that can be deposited are limited by the method of producing the evaporated substance and the deposition atmosphere. There is a problem in that the control method for supplying the evaporated substance onto the substrate at an appropriate time and at an arbitrary ratio becomes complicated.

The present invention has been made to solve these problems, and an object of the present invention is to provide a laser vapor deposition type composite film forming apparatus that is simple, low cost, and can form many types of composite films easily and with good control.

[Means for solving problems]

The laser vapor deposition type composite film forming apparatus of the present invention irradiates a material to be irradiated with a focused laser beam in a vacuum atmosphere, evaporates particles of the material to be irradiated, and deposits the particles on a base material placed at a position where the particles are deposited. In this method, a composite film is formed by evaporating different types of irradiated materials using a laser beam and depositing them simultaneously.

[For production]

In this invention, a laser beam is focused and irradiated onto the irradiated materials to be simultaneously vapor-deposited.

The type of composite membrane can be controlled, and the apparatus becomes extremely simple.

Furthermore, since a wide range of substances including high melting point ceramics can be used as the irradiation material, it is possible to form a wide variety of composite films, such as metal and ceramics, ceramics and ceramics, for example.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a block diagram of an embodiment of the present invention. In FIG. 2, fil +21 is a laser beam oscillated from a separate oscillation B (for example, a CO2 laser oscillator), +31141
is a condensing lens that condenses the laser beam fll+21, 1F
51f61 is a transmission window that guides the laser beam focused at +31 +41 into the vacuum chamber G[l, +71+81 is (
51161, each different type of first. The second irradiated material (9) is a base material to which particles evaporated from (7) and (8) are attached and deposited by condensed laser beam irradiation.

In the laser vapor deposition type composite film forming apparatus configured as described above, the laser beam (11) is focused by the condenser lens (3) in a vacuum atmosphere evacuated to tOtorr, and is transmitted through the transmission window (5) into the vacuum atmosphere. The first chamber α
The irradiated material (7) is irradiated with concentrated light, and the particles of the first irradiated material (7) are evaporated. Similarly, the laser beam (2) is transmitted through the condensing lens 1.
4) The light is focused by the transmission window (6) and sent to the vacuum chamber 0.
1, the second irradiated material (81) is irradiated with condensed light, and the particles of the second irradiated material (8) evaporate.
) and the second irradiated material (8), the particles to be evaporated are the base material (9).
), and the evaporated particles are simultaneously deposited on the substrate (9).

Evaporation of evaporating particles! (Evaporative decay) is the output of the laser beam focused and irradiated on the 1st degree second irradiated material tel [81.

That is, by controlling the output of the laser beams (1) and (2), it can be changed at any time. Therefore, the laser beam f
The output ratio of l++21, that is, the amount of evaporated particles (
By appropriately changing the evaporation rate] ratio, the composition of the vapor-deposited composite film can be kept constant or changed, so the film composition can be freely controlled.

In the above example, the evaporation degree (evaporation rate) of the irradiated material
The ratio is changed by changing the output ratio of the laser beam fi+121, but by moving the positions of the condensing lenses +31 and +41, the power density (
The amount of evaporated particles can also be controlled by changing W/7). FIG. 2 is a configuration diagram of a laser vapor deposition type composite film forming apparatus according to another embodiment of the present invention. By changing the focus position of the laser beam, the power density of the laser beam on the irradiated material can be changed.
(W/c7It).

Further, in the above embodiment, the two beams are obtained from separate oscillators, but as shown in FIG. 2, one laser oscillation unit 503. F! II. For example, the laser beam 0 oscillated by the C02 laser oscillator is split into laser beam il+ and laser beam (2) by the beam splitter 03.

The transmitted laser beam (II) may be guided into the vacuum chamber by changing the optical path using all 9 reflecting mirrors. If this method is used, a beam splitter can be used to guide the two laser beams into the vacuum chamber. Since the laser beam can be divided into multiple spectra, it is possible to evaporate two or more types of irradiated materials at the same time using just one laser oscillator, making it extremely rational as a composite film forming device.

Note that as the laser light, a YAG laser or the like may be used in addition to the CO2 laser.

Further, as the material to be irradiated, a wide variety of materials can be used, such as various ceramics and various metals.

〔Effect of the invention〕

As described above, the present invention is based on the following points: A laser beam is focused on a material to be irradiated in a vacuum atmosphere, particles of the material to be irradiated are evaporated, and the particles are placed on a base material at a position where the particles are deposited. By using a device for forming a vapor-deposited film of particles, the method is characterized in that different types of irradiated materials are vaporized by a laser beam, and a composite film is formed by simultaneously vapor-depositing them. Moreover, it is possible to obtain a laser vapor deposition type composite film forming apparatus that can easily form various types of composite films with controlled lengths at low cost.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of one embodiment of this invention, and FIG. 2 is a block diagram of another embodiment of this invention. In the figure, +II and +21 are laser beams, (7n,
(8) is the first and second irradiated materials, (9) is the base material, and αQ is the vacuum chamber. Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

[Claims] (11) A laser beam is focused on a material to be irradiated in a vacuum atmosphere, and the particles of the material to be irradiated are evaporated. A laser evaporation method for forming a composite film, which is characterized in that a composite film is formed by evaporating different types of irradiated materials using a laser beam and simultaneously depositing them. Apparatus. (2) Laser vapor deposition composite film formation according to claim 1, which controls the ratio of evaporation amount of each irradiated material by controlling the laser beam density irradiated to each irradiated material. Apparatus. (3) The density of the laser beam is controlled by controlling the focal position of the laser beam.
The laser vapor deposition type composite film forming apparatus described in 2.