JPS63135968U - - Google Patents
Info
- Publication number
- JPS63135968U JPS63135968U JP2692987U JP2692987U JPS63135968U JP S63135968 U JPS63135968 U JP S63135968U JP 2692987 U JP2692987 U JP 2692987U JP 2692987 U JP2692987 U JP 2692987U JP S63135968 U JPS63135968 U JP S63135968U
- Authority
- JP
- Japan
- Prior art keywords
- turntable
- chamber
- film deposition
- deposition apparatus
- glass film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 3
- 239000002245 particle Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2692987U JPS63135968U (enrdf_load_stackoverflow) | 1987-02-25 | 1987-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2692987U JPS63135968U (enrdf_load_stackoverflow) | 1987-02-25 | 1987-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63135968U true JPS63135968U (enrdf_load_stackoverflow) | 1988-09-07 |
Family
ID=30828485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2692987U Pending JPS63135968U (enrdf_load_stackoverflow) | 1987-02-25 | 1987-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63135968U (enrdf_load_stackoverflow) |
-
1987
- 1987-02-25 JP JP2692987U patent/JPS63135968U/ja active Pending
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