JPS63110538U - - Google Patents
Info
- Publication number
- JPS63110538U JPS63110538U JP321487U JP321487U JPS63110538U JP S63110538 U JPS63110538 U JP S63110538U JP 321487 U JP321487 U JP 321487U JP 321487 U JP321487 U JP 321487U JP S63110538 U JPS63110538 U JP S63110538U
- Authority
- JP
- Japan
- Prior art keywords
- turntable
- substrate
- board
- rotation
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Glass Melting And Manufacturing (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987003214U JPH0516193Y2 (enrdf_load_stackoverflow) | 1987-01-13 | 1987-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987003214U JPH0516193Y2 (enrdf_load_stackoverflow) | 1987-01-13 | 1987-01-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63110538U true JPS63110538U (enrdf_load_stackoverflow) | 1988-07-15 |
| JPH0516193Y2 JPH0516193Y2 (enrdf_load_stackoverflow) | 1993-04-28 |
Family
ID=30782769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987003214U Expired - Lifetime JPH0516193Y2 (enrdf_load_stackoverflow) | 1987-01-13 | 1987-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0516193Y2 (enrdf_load_stackoverflow) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5441388A (en) * | 1977-09-08 | 1979-04-02 | Banyu Pharmaceut Co Ltd | Preparation of cephradine |
| JPS5626784A (en) * | 1979-08-07 | 1981-03-14 | Tokyo Shibaura Electric Co | Glass coated substrate |
| JPS5748851A (en) * | 1980-09-08 | 1982-03-20 | Goda Tadayoshi | Display device for calling number of telephone set |
-
1987
- 1987-01-13 JP JP1987003214U patent/JPH0516193Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5441388A (en) * | 1977-09-08 | 1979-04-02 | Banyu Pharmaceut Co Ltd | Preparation of cephradine |
| JPS5626784A (en) * | 1979-08-07 | 1981-03-14 | Tokyo Shibaura Electric Co | Glass coated substrate |
| JPS5748851A (en) * | 1980-09-08 | 1982-03-20 | Goda Tadayoshi | Display device for calling number of telephone set |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0516193Y2 (enrdf_load_stackoverflow) | 1993-04-28 |
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