JPS63135966U - - Google Patents
Info
- Publication number
- JPS63135966U JPS63135966U JP2621387U JP2621387U JPS63135966U JP S63135966 U JPS63135966 U JP S63135966U JP 2621387 U JP2621387 U JP 2621387U JP 2621387 U JP2621387 U JP 2621387U JP S63135966 U JPS63135966 U JP S63135966U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- turntable
- deposition apparatus
- particle deposition
- glass particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 7
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 230000016853 telophase Effects 0.000 description 1
Landscapes
- Surface Treatment Of Glass (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemically Coating (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2621387U JPS63135966U (enrdf_load_stackoverflow) | 1987-02-24 | 1987-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2621387U JPS63135966U (enrdf_load_stackoverflow) | 1987-02-24 | 1987-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63135966U true JPS63135966U (enrdf_load_stackoverflow) | 1988-09-07 |
Family
ID=30827085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2621387U Pending JPS63135966U (enrdf_load_stackoverflow) | 1987-02-24 | 1987-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63135966U (enrdf_load_stackoverflow) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS492257B1 (enrdf_load_stackoverflow) * | 1970-07-06 | 1974-01-19 | ||
| JPS5611269B2 (enrdf_load_stackoverflow) * | 1976-02-12 | 1981-03-13 | ||
| JPS58105111A (ja) * | 1981-12-18 | 1983-06-22 | Nippon Telegr & Teleph Corp <Ntt> | ガラス光導波膜の製造方法および製造装置 |
-
1987
- 1987-02-24 JP JP2621387U patent/JPS63135966U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS492257B1 (enrdf_load_stackoverflow) * | 1970-07-06 | 1974-01-19 | ||
| JPS5611269B2 (enrdf_load_stackoverflow) * | 1976-02-12 | 1981-03-13 | ||
| JPS58105111A (ja) * | 1981-12-18 | 1983-06-22 | Nippon Telegr & Teleph Corp <Ntt> | ガラス光導波膜の製造方法および製造装置 |
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