JPS63135222U - - Google Patents

Info

Publication number
JPS63135222U
JPS63135222U JP2850987U JP2850987U JPS63135222U JP S63135222 U JPS63135222 U JP S63135222U JP 2850987 U JP2850987 U JP 2850987U JP 2850987 U JP2850987 U JP 2850987U JP S63135222 U JPS63135222 U JP S63135222U
Authority
JP
Japan
Prior art keywords
light
semiconductor substrate
receiving element
photoelectric encoder
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2850987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0413622Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987028509U priority Critical patent/JPH0413622Y2/ja
Publication of JPS63135222U publication Critical patent/JPS63135222U/ja
Application granted granted Critical
Publication of JPH0413622Y2 publication Critical patent/JPH0413622Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
JP1987028509U 1987-02-27 1987-02-27 Expired JPH0413622Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987028509U JPH0413622Y2 (enExample) 1987-02-27 1987-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987028509U JPH0413622Y2 (enExample) 1987-02-27 1987-02-27

Publications (2)

Publication Number Publication Date
JPS63135222U true JPS63135222U (enExample) 1988-09-05
JPH0413622Y2 JPH0413622Y2 (enExample) 1992-03-30

Family

ID=30831542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987028509U Expired JPH0413622Y2 (enExample) 1987-02-27 1987-02-27

Country Status (1)

Country Link
JP (1) JPH0413622Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015017916A (ja) * 2013-07-12 2015-01-29 株式会社ミツトヨ 検出ヘッド、光学式エンコーダ、及び光学式エンコーダの調整方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125076A (ja) * 1984-11-21 1986-06-12 Toshiba Corp イメ−ジセンサおよびその製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125076A (ja) * 1984-11-21 1986-06-12 Toshiba Corp イメ−ジセンサおよびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015017916A (ja) * 2013-07-12 2015-01-29 株式会社ミツトヨ 検出ヘッド、光学式エンコーダ、及び光学式エンコーダの調整方法

Also Published As

Publication number Publication date
JPH0413622Y2 (enExample) 1992-03-30

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