JPS63135000A - 電子ビ−ム装置 - Google Patents

電子ビ−ム装置

Info

Publication number
JPS63135000A
JPS63135000A JP61282794A JP28279486A JPS63135000A JP S63135000 A JPS63135000 A JP S63135000A JP 61282794 A JP61282794 A JP 61282794A JP 28279486 A JP28279486 A JP 28279486A JP S63135000 A JPS63135000 A JP S63135000A
Authority
JP
Japan
Prior art keywords
electron beam
irradiation
slit
rotating disk
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61282794A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0569400B2 (enExample
Inventor
信次 古賀
岡田　廣一
誠一郎 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawasaki Heavy Industries Ltd
Original Assignee
Kawasaki Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Heavy Industries Ltd filed Critical Kawasaki Heavy Industries Ltd
Priority to JP61282794A priority Critical patent/JPS63135000A/ja
Publication of JPS63135000A publication Critical patent/JPS63135000A/ja
Publication of JPH0569400B2 publication Critical patent/JPH0569400B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors
JP61282794A 1986-11-26 1986-11-26 電子ビ−ム装置 Granted JPS63135000A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61282794A JPS63135000A (ja) 1986-11-26 1986-11-26 電子ビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61282794A JPS63135000A (ja) 1986-11-26 1986-11-26 電子ビ−ム装置

Publications (2)

Publication Number Publication Date
JPS63135000A true JPS63135000A (ja) 1988-06-07
JPH0569400B2 JPH0569400B2 (enExample) 1993-09-30

Family

ID=17657175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61282794A Granted JPS63135000A (ja) 1986-11-26 1986-11-26 電子ビ−ム装置

Country Status (1)

Country Link
JP (1) JPS63135000A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148284A (en) * 1977-05-30 1978-12-23 Jeol Ltd Charged particle ray apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148284A (en) * 1977-05-30 1978-12-23 Jeol Ltd Charged particle ray apparatus

Also Published As

Publication number Publication date
JPH0569400B2 (enExample) 1993-09-30

Similar Documents

Publication Publication Date Title
KR101066304B1 (ko) 레이저 가공 장치 및 레이저 가공 제어 장치
JPH06131706A (ja) 情報記録装置
US3727027A (en) Method of balancing very small rotating objects using air jet acceleration
JPS63135000A (ja) 電子ビ−ム装置
US4937458A (en) Electron beam lithography apparatus including a beam blanking device utilizing a reference comparator
JP3889743B2 (ja) 荷電ビーム描画方法及び描画装置
JP2000011464A (ja) 電子ビーム照射方法及び装置
JP3745918B2 (ja) レーザトリミング装置及び方法
JPH02296125A (ja) 不釣合い修正装置
EP0501067A2 (en) Optical recording medium initializing method and apparatus
JPH0938790A (ja) 配管内面レーザ照射装置
JPH03219544A (ja) 荷電粒子注入装置
JPH0743325A (ja) イオン散乱分光装置
JP4071052B2 (ja) 光サーボライタシステム、サーボマークをデジタルリニアテープに生成するための光学システムおよび方法
JPS6227532B2 (enExample)
JPS6138607B2 (enExample)
JPH0227699A (ja) 高周波四重極加速器における加速エネルギ制御方法
JPS6323746B2 (enExample)
JPH0335884A (ja) エネルギビーム加工装置
US20250390063A1 (en) Frequency setting of a horological oscillator by optomechanical deformations
JP2968808B2 (ja) 電子銃の位置決め装置
JP2004213707A (ja) 光ディスク原盤露光装置
JP2012078359A (ja) Ｘ線計測装置及びｘ線計測方法
JPH04347045A (ja) トルクコンバータ用羽根車のブレード固定方法
JP3032259B2 (ja) 電子ビーム軸合せ装置