JPS6313446Y2 - - Google Patents
Info
- Publication number
- JPS6313446Y2 JPS6313446Y2 JP1981021775U JP2177581U JPS6313446Y2 JP S6313446 Y2 JPS6313446 Y2 JP S6313446Y2 JP 1981021775 U JP1981021775 U JP 1981021775U JP 2177581 U JP2177581 U JP 2177581U JP S6313446 Y2 JPS6313446 Y2 JP S6313446Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- mirror
- receiving surface
- light source
- observed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000005337 ground glass Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000005338 frosted glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981021775U JPS6313446Y2 (de) | 1981-02-17 | 1981-02-17 | |
| US06/348,086 US4547073A (en) | 1981-02-17 | 1982-02-11 | Surface examining apparatus and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981021775U JPS6313446Y2 (de) | 1981-02-17 | 1981-02-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57134612U JPS57134612U (de) | 1982-08-21 |
| JPS6313446Y2 true JPS6313446Y2 (de) | 1988-04-16 |
Family
ID=29819619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981021775U Expired JPS6313446Y2 (de) | 1981-02-17 | 1981-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6313446Y2 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4105256B2 (ja) * | 1997-07-29 | 2008-06-25 | 株式会社ナノシステムソリューションズ | 光照射装置及び表面検査装置 |
| JP6697285B2 (ja) * | 2015-02-25 | 2020-05-20 | 株式会社昭和電気研究所 | ウェハ欠陥検査装置 |
| JP6595951B2 (ja) * | 2016-05-19 | 2019-10-23 | 株式会社神戸製鋼所 | 金属板の粗さ推定方法及び粗さ推定装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3815998A (en) * | 1972-10-30 | 1974-06-11 | Ibm | Surface contrast system and method |
| JPS55101002A (en) * | 1979-01-26 | 1980-08-01 | Hitachi Ltd | Inspecting method for mirror face body |
-
1981
- 1981-02-17 JP JP1981021775U patent/JPS6313446Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3815998A (en) * | 1972-10-30 | 1974-06-11 | Ibm | Surface contrast system and method |
| JPS55101002A (en) * | 1979-01-26 | 1980-08-01 | Hitachi Ltd | Inspecting method for mirror face body |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57134612U (de) | 1982-08-21 |
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