JPS63134448U - - Google Patents

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Publication number
JPS63134448U
JPS63134448U JP2687487U JP2687487U JPS63134448U JP S63134448 U JPS63134448 U JP S63134448U JP 2687487 U JP2687487 U JP 2687487U JP 2687487 U JP2687487 U JP 2687487U JP S63134448 U JPS63134448 U JP S63134448U
Authority
JP
Japan
Prior art keywords
axis
chamber
center
center chamber
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2687487U
Other languages
English (en)
Other versions
JPH0521248Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2687487U priority Critical patent/JPH0521248Y2/ja
Publication of JPS63134448U publication Critical patent/JPS63134448U/ja
Application granted granted Critical
Publication of JPH0521248Y2 publication Critical patent/JPH0521248Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)

Description

【図面の簡単な説明】
第１図は本考案の要部構成説明図、第２図は従
来例の概略説明図である。 １……プラズマトーチ、９，１８……フオアチ
ヤンバー、１０，１９……センターチヤンバー、
２０ａ，２０ｂ……軸、２１……止め金具、２２
……仕切り部材。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 高周波誘導結合プラズマと質量分析計とを
    結合させてなりイオンサンプリングノズルを有す
    るフオアチヤンバーの軸芯とイオンレンズ等を有
    するセンターチヤンバーの軸芯とを一致させるよ
    うにした分析計において、前記センターチヤンバ
    ーの軸芯に対し前記フオアチヤンバーの軸芯を上
    下方向に位置決めする第１軸と、前記センターチ
    ヤンバーの軸芯に対し前記フオアチヤンバーの軸
    芯を左右方向に位置決めする第２軸とを具備し、
    これらの軸をガイドとしスライドさせるようにし
    て前記フオアチヤンバーの着脱を行うことを特徴
    とする高周波誘導結合プラズマ質量分析計。 (2) 前記第１および第２の軸は、前記センター
    チヤンターチヤンバーの軸芯を対称点として該セ
    ンターチヤンバーに固着された軸でなる実用新案
    登録請求の範囲第(1)項記載の分析計。
JP2687487U 1987-02-25 1987-02-25 Expired - Lifetime JPH0521248Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2687487U JPH0521248Y2 (ja) 1987-02-25 1987-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2687487U JPH0521248Y2 (ja) 1987-02-25 1987-02-25

Publications (2)

Publication Number Publication Date
JPS63134448U true JPS63134448U (ja) 1988-09-02
JPH0521248Y2 JPH0521248Y2 (ja) 1993-05-31

Family

ID=30828372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2687487U Expired - Lifetime JPH0521248Y2 (ja) 1987-02-25 1987-02-25

Country Status (1)

Country Link
JP (1) JPH0521248Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10125277A (ja) * 1996-08-30 1998-05-15 Hitachi Ltd 質量分析装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10125277A (ja) * 1996-08-30 1998-05-15 Hitachi Ltd 質量分析装置

Also Published As

Publication number Publication date
JPH0521248Y2 (ja) 1993-05-31

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