JPS63132128A - レンジホ−ルド付オ−トレンジ電離真空計 - Google Patents

レンジホ−ルド付オ−トレンジ電離真空計

Info

Publication number
JPS63132128A
JPS63132128A JP61276678A JP27667886A JPS63132128A JP S63132128 A JPS63132128 A JP S63132128A JP 61276678 A JP61276678 A JP 61276678A JP 27667886 A JP27667886 A JP 27667886A JP S63132128 A JPS63132128 A JP S63132128A
Authority
JP
Japan
Prior art keywords
range
measurement
vacuum gauge
pressure
control part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61276678A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0585859B2 (https=
Inventor
Takeyoshi Shibata
柴田　猛順
Toshio Koike
土志夫 小池
Shigehiko Masubuchi
成彦 増渕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Atomic Energy Agency
Ulvac Inc
Original Assignee
Japan Atomic Energy Research Institute
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Atomic Energy Research Institute, Ulvac Inc filed Critical Japan Atomic Energy Research Institute
Priority to JP61276678A priority Critical patent/JPS63132128A/ja
Publication of JPS63132128A publication Critical patent/JPS63132128A/ja
Publication of JPH0585859B2 publication Critical patent/JPH0585859B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
JP61276678A 1986-11-21 1986-11-21 レンジホ−ルド付オ−トレンジ電離真空計 Granted JPS63132128A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61276678A JPS63132128A (ja) 1986-11-21 1986-11-21 レンジホ−ルド付オ−トレンジ電離真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61276678A JPS63132128A (ja) 1986-11-21 1986-11-21 レンジホ−ルド付オ−トレンジ電離真空計

Publications (2)

Publication Number Publication Date
JPS63132128A true JPS63132128A (ja) 1988-06-04
JPH0585859B2 JPH0585859B2 (https=) 1993-12-09

Family

ID=17572791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61276678A Granted JPS63132128A (ja) 1986-11-21 1986-11-21 レンジホ−ルド付オ−トレンジ電離真空計

Country Status (1)

Country Link
JP (1) JPS63132128A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6426764B2 (ja) 2017-01-16 2018-11-21 横河電機株式会社 圧力測定器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752837A (en) * 1980-09-16 1982-03-29 Toshiba Corp Vacuum degree measuring instrument
JPS59138933A (ja) * 1983-01-31 1984-08-09 Anelva Corp 自動レンジ真空計

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752837A (en) * 1980-09-16 1982-03-29 Toshiba Corp Vacuum degree measuring instrument
JPS59138933A (ja) * 1983-01-31 1984-08-09 Anelva Corp 自動レンジ真空計

Also Published As

Publication number Publication date
JPH0585859B2 (https=) 1993-12-09

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