JPS63131526A - Cleaning jig - Google Patents

Abstract

PURPOSE:To improve the cleaning capacity of a cleaning jig by forming a fluid outlet of the jig to extend to an escape port for fluid opened on the outer periphery to prevent a foreign material from being adhered to the jig. CONSTITUTION:A cleaning jig 1 attached to a rotatable holder 2 to be rotated as the rotation of the holder 2 has a structure including a fluid escape port 1a opened on the outer periphery, a fluid outlet 1b extended to the port 1a, and a fluid inlet 1c communicating with the outlet 1b. Accordingly, cleaning fluid supplied from the outlet 1b to a material to be cleaned is also exhausted through the outlet 1b from the port 1a, and foreign materials of the material to be cleaned and the jig are externally exhausted upon exhausting of the foreign materials. Thus, it can prevent the foreign materials from being adhered to the jig and improve the cleaning capacity of the jig.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a technique that is effective when applied to a cleaning jig that cleans an object while supplying a cleaning fluid to the object to be cleaned. The present invention relates to a technology that is effective for use in cleaning jigs for reticles, photomasks, semiconductor wafers, etc. in manufacturing processes.

[Prior Art] For cleaning techniques related to the manufacture of semiconductor devices, see, for example, Kogyo Kenkyukai Co., Ltd., published November 20, 1980,
It is described in "Electronic Materials Special Volume, VLSI Manufacturing/Testing Equipment Guidebook", pages 89-94. The overview includes cleaning techniques using a brush, jetting pure water, or a combination of these techniques.

By the way, for example, after a wiring pattern has been formed on a reticle, the surface of the reticle is cleaned to remove foreign matter adhering to the surface of the pattern. As such a reticle cleaning device, there is one that is equipped with a rotating brush made of sponge and equipped with a nozzle opening. This cleaning device removes foreign matter adhering to the surface of the reticle by rotating and sliding its rotating brush on the surface of the reticle and spraying cleaning liquid, pure water, etc. from its nozzle.

[Problems to be Solved by the Invention] However, the cleaning jig of the cleaning device as described above, that is, its rotating brush, only has a required number of thank-you nozzle ports on its surface. A flow path for cleaning liquid and the like to escape is not formed in the same way. For this reason,
When the rotating brush sprays cleaning liquid from its nozzle opening while in contact with the surface of the reticle, the sprayed cleaning liquid has no way to escape, so it passes through the many slits on the surface of the rotating brush. It has no choice but to leak outside.

In this case, foreign matter attached to the surface of the rotating brush will also pass through the gap and be discharged to the outside.

However, the inventor of the present invention has found that the discharge through such a narrow gap is insufficient in discharging the attached foreign matter, and the rotating brush is likely to be clogged with the foreign matter.

In particular, this type of rotating brush is difficult to clean to remove foreign matter.
Additionally, once it dries, it has a spongy structure that cannot be regenerated, so if it becomes clogged, the only option is to replace it. Moreover, replacing this rotating brush requires a cumbersome process such as soaking a new rotating brush in water to remove the powder contained in the rotating brush, and then bonding it to the holder with adhesive. The inventors have also found that it takes a lot of time to do so.

The present invention has been made focusing on the above problems,
The purpose is to reliably prevent the adhesion of foreign matter,
The object of the present invention is to provide a technology that can improve cleaning performance.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Means for Solving the Problems] A brief overview of typical inventions disclosed in this application is as follows.

That is, the fluid outlet of the cleaning jig is formed to extend to the fluid escape port opened on the outer peripheral surface.

[Function] According to the above-described means, since the cleaning fluid supplied from the fluid outlet to the object to be cleaned is also flowed out from the fluid escape port through the fluid outlet, the attached foreign matter is not accompanied by this flow. is discharged outside. Thereby, it is possible to prevent foreign matter from adhering to the cleaning jig and improve the cleaning ability of the cleaning jig.

[Example] Fig. 1 is a perspective view showing a cleaning jig which is an embodiment of the present invention, Fig. 2 is a sectional view taken along the line FIG. 2 is an explanatory diagram showing the entire cleaning device.

The cleaning jig 1 of this embodiment consists of a circular rotating brush made of a spongy material such as sponge.

A fluid escape port 1a is provided on the outer circumferential surface of the cleaning jig 1 on the front side to allow cleaning fluid such as pure water or cleaning liquid to escape laterally. Further, a spiral groove-shaped fluid outlet 1b is provided on the surface of the cleaning jig 1, and the end of this fluid outlet 1b reaches a fluid escape port 1a.

On the other hand, as shown in FIG. 2, a fluid IC is provided on the back side of the cleaning jig 1. Furthermore, inside the cleaning jig 1,
A flow path 1d extending on the axis is formed. The fluid outlet 1b and the fluid inlet IC communicate with each other via this flow path 1d.

The cleaning jig 1 formed in this way has a rotary holder 2.
It is joined with adhesive etc.

The rotation holder 2 has a flow path 2a formed on its axis,
This flow path 2a is connected to the flow path IC of the cleaning jig 1. As shown in FIG. 3, cleaning fluid such as pure water or cleaning liquid is supplied to this flow path 2a from the drive mechanism 4 on the right side of the figure in the cleaning device 3 through the inside of the shirt 4a. It looks like this.

Further, the rotary holder 2 is rotated by a motor in the drive mechanism 4 via a shaft 4a, and is moved forward and backward in the axial direction by a cylinder in the drive mechanism 4. (In i!3, a mechanism similar to this rotary holder 2 is also provided on the left side of FIG. It is planted.

Further, the cleaning device 3 has a cleaning tank 6, and a reticle 7, which is an example of an object to be cleaned, is placed inside the cleaning tank 6 while being held by a holder 8. There is. This holder 8 has a structure in which it can be reciprocated back and forth and up and down by a drive mechanism (not shown).

Next, the operation of this embodiment will be explained.

When the reticle 7 on which a predetermined pattern has been formed is held by the holder 8 and positioned inside the cleaning tank 6, the cleaning jig 1
and the flocking brush 5 are rotated by respective motors of the drive mechanism 4.4 and slide while maintaining contact with the front and back surfaces of the reticle 70, thereby cleaning the front and back surfaces of the reticle 70. Further, the holder 8 also reciprocates up and down and back and forth by a drive mechanism (not shown). This movement causes the cleaning jig 1 and the flocking brush 5 to slide over the entire surface of the reticle 7.
The entire surface is cleaned.

On the other hand, from the drive mechanism 4 on the right side in FIG.
A cleaning fluid is appropriately supplied to the fluid inlet 1c of the cleaning jig 1 through the inside of the cleaning jig 1 and the flow path 2a of the holder 2. and,
The fluid supplied to the fluid IC of the cleaning jig 1 is discharged from the fluid outlet 1b through the flow path 1d as a spiral flow, thereby cleaning the reticle 7. At this time, cleaning jig 1
, a fluid escape port 1a is opened in a part of its outer peripheral surface, and a fluid outlet 1b is provided in the fluid escape port 1.
a, the cleaning fluid supplied to the reticle 7 passes through the fluid outlet 1b to the fluid outlet 1a.
It is also leaked from. Along with this outflow, foreign matter adhering to the reticle 7 and the cleaning jig 1 is also discharged to the outside. This makes it possible to prevent clogging of the cleaning jig 1 and improve cleaning performance.

Further, since the fluid discharged from the fluid outlet 1a becomes a swirling flow and is discharged onto one surface of the reticle 7, that one surface of the reticle 7 to be cleaned can be sufficiently cleaned.

Note that the cleaning fluid is similarly supplied from the flocking brush 5 to the opposite surface of the reticle 7 to clean the opposite surface of the reticle 7.

As described above, according to this embodiment, the following effects can be obtained.

(1) The cleaning jig 1 has a fluid escape port 1a formed on its outer circumferential surface, and a fluid outlet 1b extending to the fluid escape port 1a. Since the attached foreign matter is discharged to the outside along with the fluid flowing out from the fluid outlet 1a, it is possible to prevent clogging of the cleaning jig 1 and improve the cleaning performance.

(2) According to (1) above, it is possible to eliminate or reduce the need to replace the cleaning jig 1 due to clogging.

(3) Since the fluid outlet 1b is formed in a spiral shape, the fluid discharged from the fluid outlet 1b becomes a spiral flow and is discharged to the reticle 7, so the reticle 7 is thoroughly cleaned. can do.

(4) With the above (1) and (3), the reticle 7 can be sufficiently cleaned, and the yield of masks created using the reticle and semiconductor wafers patterned using the mask can be improved. can be improved.

[5) According to (4) above, a highly reliable semiconductor device can be provided.

[Embodiment 2] FIG. 4 is a perspective view showing a cleaning jig according to another embodiment of the present invention.

The cleaning jig 1 of the second embodiment has a curved fluid outlet 1b that is curved from the center of its surface toward the same circumferential direction.
A plurality of holes are formed equally spaced in the circumferential direction. Further, a plurality of fluid escape ports 1a are formed on the outer peripheral surface of the cleaning jig 1. The plurality of fluid outlets 1b extend to respective fluid escape ports 1a. The rest is substantially the same as the cleaning jig 1 of Example 1.

According to the cleaning jig 1 of the second embodiment, the following effects can be obtained.

(1) The cleaning jig 1 has a plurality of curved fluid outlets 1a curved in the same circumferential direction from the center of its surface, so that the fluid flows in a curved flow. Since the fluid is discharged from the fluid outlet 1a and the fluid escape port 1a, the reticle 7 can be sufficiently cleaned.
Further, foreign matter adhering to the reticle 7 and the cleaning jig 1 can be reliably discharged.

(2) A plurality of fluid outlets 1 are provided on the outer peripheral surface of the cleaning jig 1.
Since a plurality of fluid escape ports 1a are formed, each of which has an extending length b, foreign matter adhering to the reticle 7 or the cleaning jig 1 can be quickly discharged to the outside from a plurality of locations.

As above, the invention made by the present inventor has been specifically explained based on the examples, but the present invention is not limited to the above-mentioned examples, and it is understood that various changes can be made without departing from the gist of the invention. Needless to say.

For example, the cleaning jig 1 is not limited to one in which cleaning is performed by bringing the surface of the cleaning jig 1 into contact with the object to be cleaned; But that's fine. When the cleaning jig 1 is placed close to the object to be cleaned in this way,
Since there is no need to use a spongy material as the material of the cleaning jig 1, a hard material such as metal may be used as the material of the cleaning jig 1.

Further, the fluid outlet 1b may be linear, extending in the radial direction or in the tangential direction with respect to the flow path 1d.

In the above explanation, the invention made by the present inventor has been mainly applied to the field of application, which is a reticle cleaning jig. , can be applied to cleaning jigs for glass plates, lenses, mirrors, etc.

[Effects of the Invention] The effects obtained by typical inventions disclosed in this application are briefly explained as follows.

That is, it is a cleaning jig that is attached to a rotatable holder and rotates with the rotation of the holder, and has a fluid escape port provided on the outer peripheral surface and a fluid escape port provided on the surface. By adopting a structure having an extending fluid outlet and a fluid inlet communicating with the fluid outlet, the cleaning fluid supplied from the fluid outlet to the object to be cleaned is
The fluid is also discharged from the fluid escape port through the fluid outlet, and foreign matter adhering to the object to be cleaned and the cleaning jig is also discharged to the outside together with this discharge, preventing foreign matter from adhering to the cleaning jig and cleaning the cleaning jig. It is possible to improve the cleaning ability of the utensils.

[Brief explanation of the drawing]

Figure 1 is a perspective view showing a cleaning jig that is an embodiment of the present invention, Figure 2 is a sectional view taken along the line ■-■ in Figure 1, and Figure 3 is a diagram of a cleaning device using this cleaning jig. FIG. 4 is a perspective view showing a cleaning jig according to another embodiment of the present invention. 1...Cleaning jig, 1a...Fluid escape port, 1b
...Fluid outlet, 1c...Fluid outlet, 1d.
...Flow path, 2...Rotation holder, 2a...Flow path, 3...Cleaning device, 4...Drive mechanism, 4a...
...Shaft, 5..Rotating brush, 6..Cleaning tank, 7..Reticle, 8..Holder. Figure 1 tb 1 Figure 2 IC-594;

Claims (1)

[Claims] 1. A cleaning jig that is attached to a rotatable holder and rotates with the rotation of the holder, which comprises a fluid escape port provided on the outer circumferential surface and a fluid escape port provided on the surface. A cleaning jig having a fluid outlet extending to a fluid escape port, and a fluid inlet communicating with the fluid outlet. 2. The cleaning jig according to claim 1, which is made of a spongy material. 3. The cleaning jig according to claim 1, wherein the fluid outlet is formed in a spiral shape.