JPS63131059U - - Google Patents
Info
- Publication number
- JPS63131059U JPS63131059U JP2308687U JP2308687U JPS63131059U JP S63131059 U JPS63131059 U JP S63131059U JP 2308687 U JP2308687 U JP 2308687U JP 2308687 U JP2308687 U JP 2308687U JP S63131059 U JPS63131059 U JP S63131059U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- secondary electron
- electron
- secondary electrons
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 8
- 230000005684 electric field Effects 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2308687U JPS63131059U (bg) | 1987-02-19 | 1987-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2308687U JPS63131059U (bg) | 1987-02-19 | 1987-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63131059U true JPS63131059U (bg) | 1988-08-26 |
Family
ID=30821079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2308687U Pending JPS63131059U (bg) | 1987-02-19 | 1987-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63131059U (bg) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60165733A (ja) * | 1984-02-08 | 1985-08-28 | Toshiba Corp | ストロボ走査型電子顕微鏡装置 |
-
1987
- 1987-02-19 JP JP2308687U patent/JPS63131059U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60165733A (ja) * | 1984-02-08 | 1985-08-28 | Toshiba Corp | ストロボ走査型電子顕微鏡装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS63131059U (bg) | ||
| JPH0334253A (ja) | イオン検出器 | |
| JPS58174856U (ja) | 電子顕微鏡 | |
| JPH067557Y2 (ja) | ２次電子検出器 | |
| JPS63108156U (bg) | ||
| JPS61101956U (bg) | ||
| JPS60187450U (ja) | 走査電子顕微鏡用２次電子検出装置 | |
| JPS61104960U (bg) | ||
| JPH0171857U (bg) | ||
| JPS58148654U (ja) | 電子的分析装置用試料カプセル | |
| JPH0254156U (bg) | ||
| JPS62129759U (bg) | ||
| JPS60100349A (ja) | ２次電子検出器 | |
| JPS58115383A (ja) | 反射電子検出器 | |
| JPS61194951U (bg) | ||
| JPS6399752U (bg) | ||
| JPS6065967U (ja) | 走査電子顕微鏡 | |
| JPS6119774U (ja) | 走査電子顕微鏡を用いた電位測定装置 | |
| JPS585275U (ja) | 走査電子顕微鏡 | |
| JP3114583B2 (ja) | 二次電子検出装置 | |
| JPS61153958U (bg) | ||
| JPS619761U (ja) | 電子線装置 | |
| JPS59125058U (ja) | 荷電粒子線装置における二次電子検出装置 | |
| JPS5945849U (ja) | イオン注入装置 | |
| JPS62169462U (bg) |